Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9012030 | Process chamber component having yttrium—aluminum coating | Li Xu, Hong Shih | 2015-04-21 |
| 8114525 | Process chamber component having electroplated yttrium containing coating | Li Xu, Hong Shih, Yang Zhang, Danny Lu, Jennifer Y. Sun | 2012-02-14 |
| 8110086 | Method of manufacturing a process chamber component having yttrium-aluminum coating | Li Xu, Hong Shih | 2012-02-07 |
| 7833401 | Electroplating an yttrium-containing coating on a chamber component | Li Xu, Hong Shih, Yang Zhang, Danny Lu, Jennifer Y. Sun | 2010-11-16 |
| 7371467 | Process chamber component having electroplated yttrium containing coating | Li Xu, Hong Shih, Yang Zhang, Danny Lu, Jennifer Y. Sun | 2008-05-13 |
| 6942929 | Process chamber having component with yttrium-aluminum coating | Li Xu, Hong Shih | 2005-09-13 |
| 6808747 | Coating boron carbide on aluminum | Hong Shih | 2004-10-26 |
| 6641697 | Substrate processing using a member comprising an oxide of a group IIIB metal | Hong Shih, Jie Yuan, Danny Lu, Diana Xiaobing Ma | 2003-11-04 |
| 6623595 | Wavy and roughened dome in plasma processing reactor | Hong Shih, Li Xu, Yan Ye | 2003-09-23 |
| 6592707 | Corrosion-resistant protective coating for an apparatus and method for processing a substrate | Hong Shih, Jie Yuan, Joe Sommers, Diana Xiaobing Ma, Paul Vollmer +1 more | 2003-07-15 |
| 6508911 | Diamond coated parts in a plasma reactor | Hong Shih, Jennifer Y. Sun, Li Xu | 2003-01-21 |
| 6413389 | Method for recovering metal from etch by-products | Hong Shih, Danny Lu, Li Xu, Diana Xiaobing Ma | 2002-07-02 |
| 6352611 | Ceramic composition for an apparatus and method for processing a substrate | Hong Shih, Jie Yuan, Danny Lu, Diana Xiaobing Ma | 2002-03-05 |
| 6123791 | Ceramic composition for an apparatus and method for processing a substrate | Hong Shih, Jie Yuan, Danny Lu, Diana Xiaobing Ma | 2000-09-26 |
| 6120640 | Boron carbide parts and coatings in a plasma reactor | Hong Shih, Steve S. Y. Mak, Gerald Yin | 2000-09-19 |
| 5904778 | Silicon carbide composite article particularly useful for plasma reactors | Hao Lu, Gerald Yin, Robert Wu | 1999-05-18 |