Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8734660 | Advanced mask patterning with patterning layer | Jian Ma, Phil Freiberger, Karmen Yung, Frederick Chen, Chaoyang Li | 2014-05-27 |
| 7460209 | Advanced mask patterning with patterning layer | Jian Ma, Phil Freiberger, Karmen Yung, Frederick Chen, Chaoyang Li | 2008-12-02 |
| 7270761 | Fluorine free integrated process for etching aluminum including chamber dry clean | Xikun Wang, Hui Chen, Anbei Jiang, Hong Shih | 2007-09-18 |
| 6919168 | Masking methods and etching sequences for patterning electrodes of high density RAM capacitors | Jeng H. Hwang, True-Lon Lin, Chentsau Ying, John W. Schaller | 2005-07-19 |
| 6749770 | Method of etching an anisotropic profile in platinum | Jeng H. Hwang, Chentsau Ying, Kang-Lie Chiang | 2004-06-15 |
| 6598615 | Compact independent pressure control and vacuum isolation for a turbomolecular pumped plasma reaction chamber | John Holland, Michael Barnes, Patrick Leahey, Jonathan D. Mohn | 2003-07-29 |
| 6323132 | Etching methods for anisotropic platinum profile | Jeng H. Hwang, Chentsau Ying, Kang-Lie Chiang | 2001-11-27 |
| 6277251 | Apparatus and method for shielding a dielectric member to allow for stable power transmission into a plasma processing chamber | Jeng H. Hwang, Yan Ye | 2001-08-21 |
| 6270687 | RF plasma method | Yan Ye, Donald Olgado, Avi Tepman, Diana Xiaobing Ma, Gerald Yin +2 more | 2001-08-07 |
| 6265318 | Iridium etchant methods for anisotropic profile | Jeng H. Hwang, Chentsau Ying, Guang Xiang Jin | 2001-07-24 |
| 6120640 | Boron carbide parts and coatings in a plasma reactor | Hong Shih, Nianci Han, Gerald Yin | 2000-09-19 |
| 6071372 | RF plasma etch reactor with internal inductive coil antenna and electrically conductive chamber walls | Yan Ye, Donald Olgado, Avi Tepman, Diana Xiaobing Ma, Gerald Yin +2 more | 2000-06-06 |
| 5942039 | Self-cleaning focus ring | Arnold Kholodenko | 1999-08-24 |
| 5891348 | Process gas focusing apparatus and method | Yan Ye, Gerald Yin, Diana Xiaobing Ma | 1999-04-06 |
| 5885358 | Gas injection slit nozzle for a plasma process reactor | Dan Maydan, Donald Olgado, Gerald Yin, Timothy D. Driscoll, James S. Papanu +1 more | 1999-03-23 |
| 5756400 | Method and apparatus for cleaning by-products from plasma chamber surfaces | Yan Ye, Diana Xiaobing Ma, Gerald Yin, Keshav Prasad, Mark Siegel +3 more | 1998-05-26 |
| 5746875 | Gas injection slit nozzle for a plasma process reactor | Dan Maydan, Donald Olgado, Gerald Yin, Timothy D. Driscoll, James S. Papanu +1 more | 1998-05-05 |
| 5643394 | Gas injection slit nozzle for a plasma process reactor | Dan Maydan, Donald Olgado, Gerald Yin, Timothy D. Driscoll, Brian Sy-Yuan Shieh +1 more | 1997-07-01 |
| 5545289 | Passivating, stripping and corrosion inhibition of semiconductor substrates | Jian-Sheng Chen, James S. Papanu, Carmel Ish-Shalom, Peter Hsieh, Wesley Lau +5 more | 1996-08-13 |