Issued Patents All Time
Showing 25 most recent of 59 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9905402 | Plasma processing chamber with a grounded electrode assembly | Anwar Husain | 2018-02-27 |
| 9111968 | Plasma processing chamber with a grounded electrode assembly | Anwer Husain | 2015-08-18 |
| 8900400 | Proximity head having a fluid resistor | Cheng-Yu Lin, Russell Martin | 2014-12-02 |
| 8757177 | Multi-stage substrate cleaning method and apparatus | Katrina Mikhaylichenko, Cheng-Yu Lin, Mark Wilcoxson, Leon Ginzburg, Mark Kawaguchi | 2014-06-24 |
| 8739805 | Confinement of foam delivered by a proximity head | Cheng-Yu Lin, Leon Ginzburg, Mark Mandelboym, Gregory A. Tomasch, Anwar Husain | 2014-06-03 |
| 8584613 | Single substrate processing head for particle removal using low viscosity fluid | Cheng-Yu Lin, Leon Ginzburg, Mark Mandelboym, Gregory A. Tomasch, Anwar Husain | 2013-11-19 |
| 8557051 | Method for using generator for foam to clean substrate | Anwar Husain, Gregory A. Tomasch, Cheng-Yu Lin | 2013-10-15 |
| 8317934 | Multi-stage substrate cleaning method and apparatus | Katrina Mikhaylichenko, Cheng-Yu Lin, Mark Wilcoxson, Leon Ginzburg, Mark Kawaguchi | 2012-11-27 |
| 8317966 | Apparatus for substantially uniform fluid flow rates relative to a proximity head in processing of a wafer surface by a meniscus | Cheng-Yu Lin, Russell Martin | 2012-11-27 |
| 8313582 | System, method and apparatus for maintaining separation of liquids in a controlled meniscus | Robert O'Donnell, Cheng-Yu Lin | 2012-11-20 |
| 8292697 | Method for manufacturing a hybrid composite wafer carrier for wet clean equipment | Wing Cheng | 2012-10-23 |
| 8261905 | Wafer carrier drive apparatus and method for operating the same | Anwar Husain, George Khait | 2012-09-11 |
| 8246755 | In situ morphological characterization of foam for a proximity head | Gregrory A. Tomasch, Leonid Isaakovich Ginzburg, Cheng-Yu Lin | 2012-08-21 |
| 8161984 | Generator for foam to clean substrate | Anwar Husain, Gregory A. Tomasch, Cheng-Yu Lin | 2012-04-24 |
| 8146902 | Hybrid composite wafer carrier for wet clean equipment | Wing Cheng | 2012-04-03 |
| 8141566 | System, method and apparatus for maintaining separation of liquids in a controlled meniscus | Robert O'Donnell, Cheng-Yu Lin | 2012-03-27 |
| 7998304 | Methods of configuring a proximity head that provides uniform fluid flow relative to a wafer | Cheng-Yu Lin | 2011-08-16 |
| 7743730 | Apparatus for an optimized plasma chamber grounded electrode assembly | Anwar Husain | 2010-06-29 |
| 7699634 | High power electrical connector for a laminated heater | Russell Martin, John Rasnick, Christopher Kimball | 2010-04-20 |
| 7572334 | Apparatus for fabricating large-surface area polycrystalline silicon sheets for solar cell application | Robert Z. Bachrach, Mark Mandelboym | 2009-08-11 |
| 6908540 | Method and apparatus for encapsulation of an edge of a substrate during an electro-chemical deposition process | — | 2005-06-21 |
| 6828241 | Efficient cleaning by secondary in-situ activation of etch precursor from remote plasma source | Peter I. Porshnev | 2004-12-07 |
| 6795292 | Apparatus for regulating temperature of a process kit in a semiconductor wafer-processing chamber | Dennis S. Grimard, Alex Veytser, Senh Thach, Wing Cheng | 2004-09-21 |
| 6736668 | High temperature electrical connector | Senh Thach, Wing Cheng, Alvin Lau, Dennis S. Grimard | 2004-05-18 |
| 6721162 | Electrostatic chuck having composite dielectric layer and method of manufacture | Edwin C. Weldon, Kenneth S. Collins, Arik Donde, Brian Lue, Dan Maydan +8 more | 2004-04-13 |