Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6899798 | Reusable ceramic-comprising component which includes a scrificial surface layer | Yongxiang He, Hong Wang, Clifford Stow | 2005-05-31 |
| 6721162 | Electrostatic chuck having composite dielectric layer and method of manufacture | Kenneth S. Collins, Arik Donde, Brian Lue, Dan Maydan, Robert Steger +8 more | 2004-04-13 |
| 6440221 | Process chamber having improved temperature control | Shamouil Shamouilian, Ananda H. Kumar, Kadthala Ramaya Narendrnath, Eric Askarinam, Michael R. Rice +1 more | 2002-08-27 |
| 6414834 | Dielectric covered electrostatic chuck | Kenneth S. Collins, Arik Donde, Brian Lue, Dan Maydan, Robert Steger +8 more | 2002-07-02 |
| 6263829 | Process chamber having improved gas distributor and method of manufacture | Gerhard Schneider | 2001-07-24 |
| 6220607 | Thermally conductive conformal media | Gerhard Schneider, Ananda H. Kumar, Kadthala Ramaya Narendrnath | 2001-04-24 |
| 6108189 | Electrostatic chuck having improved gas conduits | Kenneth S. Collins, Arik Donde, Brian Lue, Dan Maydan, Robert Steger +8 more | 2000-08-22 |
| 5986875 | Puncture resistant electrostatic chuck | Arik Donde, Hyman J. Levinstein, Robert Wu, Andreas Hegedus, Shamouil Shamouilian +2 more | 1999-11-16 |
| 5904776 | Conduits for flow of heat transfer fluid to the surface of an electrostatic chuck | Arik Donde, Dan Maydan, Robert Steger, Brian Lue, Timothy Dyer | 1999-05-18 |
| 5729423 | Puncture resistant electrostatic chuck | Arik Donde, Hyman J. Levinstein, Robert Wu, Andreas Hegedus, Shamouil Shamouilian +2 more | 1998-03-17 |
| 5720818 | Conduits for flow of heat transfer fluid to the surface of an electrostatic chuck | Arik Donde, Dan Maydan, Robert Steger, Brian Lue, Timothy Dyer | 1998-02-24 |