| 6899798 |
Reusable ceramic-comprising component which includes a scrificial surface layer |
Yongxiang He, Hong Wang, Clifford Stow |
2005-05-31 |
| 6721162 |
Electrostatic chuck having composite dielectric layer and method of manufacture |
Kenneth S. Collins, Arik Donde, Brian Lue, Dan Maydan, Robert Steger +8 more |
2004-04-13 |
| 6440221 |
Process chamber having improved temperature control |
Shamouil Shamouilian, Ananda H. Kumar, Kadthala Ramaya Narendrnath, Eric Askarinam, Michael R. Rice +1 more |
2002-08-27 |
| 6414834 |
Dielectric covered electrostatic chuck |
Kenneth S. Collins, Arik Donde, Brian Lue, Dan Maydan, Robert Steger +8 more |
2002-07-02 |
| 6263829 |
Process chamber having improved gas distributor and method of manufacture |
Gerhard Schneider |
2001-07-24 |
| 6220607 |
Thermally conductive conformal media |
Gerhard Schneider, Ananda H. Kumar, Kadthala Ramaya Narendrnath |
2001-04-24 |
| 6108189 |
Electrostatic chuck having improved gas conduits |
Kenneth S. Collins, Arik Donde, Brian Lue, Dan Maydan, Robert Steger +8 more |
2000-08-22 |
| 5986875 |
Puncture resistant electrostatic chuck |
Arik Donde, Hyman J. Levinstein, Robert Wu, Andreas Hegedus, Shamouil Shamouilian +2 more |
1999-11-16 |
| 5904776 |
Conduits for flow of heat transfer fluid to the surface of an electrostatic chuck |
Arik Donde, Dan Maydan, Robert Steger, Brian Lue, Timothy Dyer |
1999-05-18 |
| 5729423 |
Puncture resistant electrostatic chuck |
Arik Donde, Hyman J. Levinstein, Robert Wu, Andreas Hegedus, Shamouil Shamouilian +2 more |
1998-03-17 |
| 5720818 |
Conduits for flow of heat transfer fluid to the surface of an electrostatic chuck |
Arik Donde, Dan Maydan, Robert Steger, Brian Lue, Timothy Dyer |
1998-02-24 |
