Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6623596 | Plasma reactor having an inductive antenna coupling power through a parallel plate electrode | Kenneth S. Collins, Michael R. Rice, John Trow, Douglas A. Buchberger, Jr., Joshua Chiu-Wing Tsui +2 more | 2003-09-23 |
| 6524432 | Parallel-plate electrode plasma reactor having an inductive antenna and adjustable radial distribution of plasma ion density | Kenneth S. Collins, Michael R. Rice, John Trow, Douglas A. Buchberger, Jr., Joshua Chiu-Wing Tsui +2 more | 2003-02-25 |
| 6514376 | Thermal control apparatus for inductively coupled RF plasma reactor having an overhead solenoidal antenna | Kenneth S. Collins, Michael R. Rice, Douglas A. Buchberger, Jr., Craig A. Roderick | 2003-02-04 |
| 6454898 | Inductively coupled RF Plasma reactor having an overhead solenoidal antenna and modular confinement magnet liners | Kenneth S. Collins, Michael R. Rice, Douglas A. Buchberger, Jr., Craig A. Roderick, Gerhard Schneider +5 more | 2002-09-24 |
| 6440221 | Process chamber having improved temperature control | Shamouil Shamouilian, Ananda H. Kumar, Kadthala Ramaya Narendrnath, Edwin C. Weldon, Michael R. Rice +1 more | 2002-08-27 |
| 6095083 | Vacuum processing chamber having multi-mode access | Michael R. Rice, Gerhard Schneider, Kenneth S. Collins | 2000-08-01 |
| 6077384 | Plasma reactor having an inductive antenna coupling power through a parallel plate electrode | Kenneth S. Collins, Michael R. Rice, John Trow, Douglas A. Buchberger, Jr., Joshua Chiu-Wing Tsui +2 more | 2000-06-20 |
| 6074512 | Inductively coupled RF plasma reactor having an overhead solenoidal antenna and modular confinement magnet liners | Kenneth S. Collins, Michael R. Rice, Douglas A. Buchberger, Jr., Craig A. Roderick, Gerhard Schneider +5 more | 2000-06-13 |
| 6063233 | Thermal control apparatus for inductively coupled RF plasma reactor having an overhead solenoidal antenna | Kenneth S. Collins, Michael R. Rice, Douglas A. Buchberger, Jr., Craig A. Roderick | 2000-05-16 |
| 6054013 | Parallel plate electrode plasma reactor having an inductive antenna and adjustable radial distribution of plasma ion density | Kenneth S. Collins, Michael R. Rice, John Trow, Douglas A. Buchberger, Jr., Joshua Chiu-Wing Tsui +2 more | 2000-04-25 |
| 5722668 | Protective collar for vacuum seal in a plasma etch reactor | Michael R. Rice | 1998-03-03 |