| 6623596 |
Plasma reactor having an inductive antenna coupling power through a parallel plate electrode |
Kenneth S. Collins, Michael R. Rice, John Trow, Douglas A. Buchberger, Jr., Joshua Chiu-Wing Tsui +2 more |
2003-09-23 |
| 6524432 |
Parallel-plate electrode plasma reactor having an inductive antenna and adjustable radial distribution of plasma ion density |
Kenneth S. Collins, Michael R. Rice, John Trow, Douglas A. Buchberger, Jr., Joshua Chiu-Wing Tsui +2 more |
2003-02-25 |
| 6514376 |
Thermal control apparatus for inductively coupled RF plasma reactor having an overhead solenoidal antenna |
Kenneth S. Collins, Michael R. Rice, Douglas A. Buchberger, Jr., Craig A. Roderick |
2003-02-04 |
| 6454898 |
Inductively coupled RF Plasma reactor having an overhead solenoidal antenna and modular confinement magnet liners |
Kenneth S. Collins, Michael R. Rice, Douglas A. Buchberger, Jr., Craig A. Roderick, Gerhard Schneider +5 more |
2002-09-24 |
| 6440221 |
Process chamber having improved temperature control |
Shamouil Shamouilian, Ananda H. Kumar, Kadthala Ramaya Narendrnath, Edwin C. Weldon, Michael R. Rice +1 more |
2002-08-27 |
| 6095083 |
Vacuum processing chamber having multi-mode access |
Michael R. Rice, Gerhard Schneider, Kenneth S. Collins |
2000-08-01 |
| 6077384 |
Plasma reactor having an inductive antenna coupling power through a parallel plate electrode |
Kenneth S. Collins, Michael R. Rice, John Trow, Douglas A. Buchberger, Jr., Joshua Chiu-Wing Tsui +2 more |
2000-06-20 |
| 6074512 |
Inductively coupled RF plasma reactor having an overhead solenoidal antenna and modular confinement magnet liners |
Kenneth S. Collins, Michael R. Rice, Douglas A. Buchberger, Jr., Craig A. Roderick, Gerhard Schneider +5 more |
2000-06-13 |
| 6063233 |
Thermal control apparatus for inductively coupled RF plasma reactor having an overhead solenoidal antenna |
Kenneth S. Collins, Michael R. Rice, Douglas A. Buchberger, Jr., Craig A. Roderick |
2000-05-16 |
| 6054013 |
Parallel plate electrode plasma reactor having an inductive antenna and adjustable radial distribution of plasma ion density |
Kenneth S. Collins, Michael R. Rice, John Trow, Douglas A. Buchberger, Jr., Joshua Chiu-Wing Tsui +2 more |
2000-04-25 |
| 5722668 |
Protective collar for vacuum seal in a plasma etch reactor |
Michael R. Rice |
1998-03-03 |
