Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6623596 | Plasma reactor having an inductive antenna coupling power through a parallel plate electrode | Kenneth S. Collins, Michael R. Rice, John Trow, Douglas A. Buchberger, Jr., Eric Askarinam +2 more | 2003-09-23 |
| 6524432 | Parallel-plate electrode plasma reactor having an inductive antenna and adjustable radial distribution of plasma ion density | Kenneth S. Collins, Michael R. Rice, John Trow, Douglas A. Buchberger, Jr., Eric Askarinam +2 more | 2003-02-25 |
| 6454898 | Inductively coupled RF Plasma reactor having an overhead solenoidal antenna and modular confinement magnet liners | Kenneth S. Collins, Michael R. Rice, Douglas A. Buchberger, Jr., Craig A. Roderick, Eric Askarinam +5 more | 2002-09-24 |
| 6077384 | Plasma reactor having an inductive antenna coupling power through a parallel plate electrode | Kenneth S. Collins, Michael R. Rice, John Trow, Douglas A. Buchberger, Jr., Eric Askarinam +2 more | 2000-06-20 |
| 6074512 | Inductively coupled RF plasma reactor having an overhead solenoidal antenna and modular confinement magnet liners | Kenneth S. Collins, Michael R. Rice, Douglas A. Buchberger, Jr., Craig A. Roderick, Eric Askarinam +5 more | 2000-06-13 |
| 6054013 | Parallel plate electrode plasma reactor having an inductive antenna and adjustable radial distribution of plasma ion density | Kenneth S. Collins, Michael R. Rice, John Trow, Douglas A. Buchberger, Jr., Eric Askarinam +2 more | 2000-04-25 |
| 5800871 | Electrostatic chuck with polymeric impregnation and method of making | Kenneth S. Collins, Douglas A. Buchberger, Jr. | 1998-09-01 |
| 5792562 | Electrostatic chuck with polymeric impregnation and method of making | Kenneth S. Collins, Douglas A. Buchberger, Jr. | 1998-08-11 |
| 5762714 | Plasma guard for chamber equipped with electrostatic chuck | Jon Mohn, Kenneth S. Collins | 1998-06-09 |
| 5583737 | Electrostatic chuck usable in high density plasma | Kenneth S. Collins, John Trow, Craig A. Roderick, Nicolas Bright, Jeffrey Marks +2 more | 1996-12-10 |
| 5539609 | Electrostatic chuck usable in high density plasma | Kenneth S. Collins, John Trow, Craig A. Roderick, Nicolas Bright, Jeffrey Marks +2 more | 1996-07-23 |
| 5350479 | Electrostatic chuck for high power plasma processing | Kenneth S. Collins, John Trow, Craig A. Roderick, Nicolas Bright, Jeffrey Marks +1 more | 1994-09-27 |