Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6440866 | Plasma reactor with heated source of a polymer-hardening precursor material | Kenneth S. Collins, Michael R. Rice, David W. Groechel, Gerald Yin, Craig A. Roderick +5 more | 2002-08-27 |
| 6218312 | Plasma reactor with heated source of a polymer-hardening precursor material | Kenneth S. Collins, Michael R. Rice, David W. Groechel, Gerald Yin, Craig A. Roderick +5 more | 2001-04-17 |
| 6193836 | Center gas feed apparatus for a high density plasma reactor | Mei Chang, Raymond Hung, Kenneth S. Collins, Ru-Liang Lee | 2001-02-27 |
| 6036877 | Plasma reactor with heated source of a polymer-hardening precursor material | Kenneth S. Collins, Michael R. Rice, David W. Groechel, Gerald Yin, Craig A. Roderick +5 more | 2000-03-14 |
| 6024826 | Plasma reactor with heated source of a polymer-hardening precursor material | Kenneth S. Collins, Michael R. Rice, David W. Groechel, Gerald Yin, Craig A. Roderick +5 more | 2000-02-15 |
| 5990017 | Plasma reactor with heated source of a polymer-hardening precursor material | Kenneth S. Collins, Michael R. Rice, David W. Groechel, Gerald Yin, Craig A. Roderick +5 more | 1999-11-23 |
| 5762714 | Plasma guard for chamber equipped with electrostatic chuck | Joshua Chiu-Wing Tsui, Kenneth S. Collins | 1998-06-09 |
| 5437757 | Clamp ring for domed pedestal in wafer processing chamber | Michael R. Rice | 1995-08-01 |