| 6440866 |
Plasma reactor with heated source of a polymer-hardening precursor material |
Kenneth S. Collins, Michael R. Rice, David W. Groechel, Gerald Yin, Craig A. Roderick +5 more |
2002-08-27 |
| 6218312 |
Plasma reactor with heated source of a polymer-hardening precursor material |
Kenneth S. Collins, Michael R. Rice, David W. Groechel, Gerald Yin, Craig A. Roderick +5 more |
2001-04-17 |
| 6193836 |
Center gas feed apparatus for a high density plasma reactor |
Mei Chang, Raymond Hung, Kenneth S. Collins, Ru-Liang Lee |
2001-02-27 |
| 6036877 |
Plasma reactor with heated source of a polymer-hardening precursor material |
Kenneth S. Collins, Michael R. Rice, David W. Groechel, Gerald Yin, Craig A. Roderick +5 more |
2000-03-14 |
| 6024826 |
Plasma reactor with heated source of a polymer-hardening precursor material |
Kenneth S. Collins, Michael R. Rice, David W. Groechel, Gerald Yin, Craig A. Roderick +5 more |
2000-02-15 |
| 5990017 |
Plasma reactor with heated source of a polymer-hardening precursor material |
Kenneth S. Collins, Michael R. Rice, David W. Groechel, Gerald Yin, Craig A. Roderick +5 more |
1999-11-23 |
| 5762714 |
Plasma guard for chamber equipped with electrostatic chuck |
Joshua Chiu-Wing Tsui, Kenneth S. Collins |
1998-06-09 |
| 5437757 |
Clamp ring for domed pedestal in wafer processing chamber |
Michael R. Rice |
1995-08-01 |
