Issued Patents All Time
Showing 25 most recent of 238 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12334383 | Substrate support gap pumping to prevent glow discharge and light-up | James D. Carducci, Michael R. Rice, Kartik Ramaswamy, Silverst Rodrigues, Yang Yang | 2025-06-17 |
| 12163218 | Continuous liner for use in a processing chamber | James D. Carducci, Kartik Ramaswamy | 2024-12-10 |
| 11935724 | Symmetric VHF source for a plasma reactor | Kartik Ramaswamy, Igor Markovsky, Zhigang Chen, James D. Carducci, Shahid Rauf +3 more | 2024-03-19 |
| 11814724 | Continuous liner for use in a processing chamber | James D. Carducci, Kartik Ramaswamy | 2023-11-14 |
| 11651966 | Methods and apparatus for processing a substrate | Kartik Ramaswamy, Yang Yang, Steven Lane, Gonzalo Monroy, Yue Guo | 2023-05-16 |
| 11587766 | Symmetric VHF source for a plasma reactor | Kartik Ramaswamy, Igor Markovsky, Zhigang Chen, James D. Carducci, Shahid Rauf +3 more | 2023-02-21 |
| 11499223 | Continuous liner for use in a processing chamber | James D. Carducci, Kartik Ramaswamy | 2022-11-15 |
| 11424104 | Plasma reactor with electrode filaments extending from ceiling | Michael R. Rice, Kartik Ramaswamy, James D. Carducci | 2022-08-23 |
| 11373882 | Coated article and semiconductor chamber apparatus formed from yttrium oxide and zirconium oxide | Jennifer Y. Sun, Ren-Guan Duan, Jie Yuan, Li Xu | 2022-06-28 |
| 11355321 | Plasma reactor with electrode assembly for moving substrate | Michael R. Rice, Kartik Ramaswamy, James D. Carducci | 2022-06-07 |
| 11315760 | Symmetric plasma process chamber | James D. Carducci, Hamid Tavassoli, Ajit Balakrishna, Zhigang Chen, Andrew Nguyen +3 more | 2022-04-26 |
| 11114284 | Plasma reactor with electrode array in ceiling | Michael R. Rice, Kartik Ramaswamy, James D. Carducci, Shahid Rauf, Kallol Bera | 2021-09-07 |
| 11101113 | Ion-ion plasma atomic layer etch process | Kartik Ramaswamy, James D. Carducci, Shahid Rauf, Leonid Dorf, Yang Yang | 2021-08-24 |
| 11043387 | Methods and apparatus for processing a substrate | Kartik Ramaswamy, Yang Yang, Steven Lane, Gonzalo Monroy, Yue Guo | 2021-06-22 |
| 11043375 | Plasma deposition of carbon hardmask | Yang Yang, Eswaranand Venkatasubramanian, Kartik Ramaswamy, Steven Lane, Gonzalo Monroy +2 more | 2021-06-22 |
| 11043361 | Symmetric VHF source for a plasma reactor | Kartik Ramaswamy, Igor Markovsky, Zhigang Chen, James D. Carducci, Shahid Rauf +3 more | 2021-06-22 |
| 11043360 | Gas distribution plate assembly for high power plasma etch processes | James D. Carducci, Kartik Ramaswamy, Michael R. Rice, Richard Fovell, Vijay D. Parkhe | 2021-06-22 |
| 10847386 | Method of forming a bulk article and semiconductor chamber apparatus from yttrium oxide and zirconium oxide | Jennifer Y. Sun, Ren-Guan Duan, Jie Yuan, Li Xu | 2020-11-24 |
| 10840113 | Method of forming a coated article and semiconductor chamber apparatus from yttrium oxide and zirconium oxide | Jennifer Y. Sun, Ren-Guan Duan, Jie Yuan, Li Xu | 2020-11-17 |
| 10840112 | Coated article and semiconductor chamber apparatus formed from yttrium oxide and zirconium oxide | Jennifer Y. Sun, Ren-Guan Duan, Jie Yuan, Li Xu | 2020-11-17 |
| 10811226 | Symmetrical plural-coil plasma source with side RF feeds and RF distribution plates | James D. Carducci, Richard Fovell, Jason A. Kenney, Kartik Ramaswamy, Shahid Rauf | 2020-10-20 |
| 10790153 | Methods and apparatus for electron beam etching process | Yue Guo, Yang Yang, Kartik Ramaswamy, Steven Lane, Gonzalo Monroy +1 more | 2020-09-29 |
| 10784085 | Plasma processing reactor with a magnetic electron-blocking filter external of the chamber and uniform field within the chamber | Kartik Ramaswamy, Steven Lane, Yang Yang, Lawrence Wong | 2020-09-22 |
| 10770269 | Apparatus and methods for reducing particles in semiconductor process chambers | Andrew Nguyen, Bradley J. Howard, Shahid Rauf, Ajit Balakrishna, Tom Choi +3 more | 2020-09-08 |
| 10707086 | Etching methods | Yang Yang, Kartik Ramaswamy, Steven Lane, Gonzalo Monroy, Lucy Chen +1 more | 2020-07-07 |