Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 11043375 | Plasma deposition of carbon hardmask | Yang Yang, Eswaranand Venkatasubramanian, Kartik Ramaswamy, Kenneth S. Collins, Steven Lane +2 more | 2021-06-22 | $66,836,000 |
| 10790153 | Methods and apparatus for electron beam etching process | Yue Guo, Yang Yang, Kartik Ramaswamy, Kenneth S. Collins, Steven Lane +1 more | 2020-09-29 | $24,138,000 |
| 10707086 | Etching methods | Yang Yang, Kartik Ramaswamy, Kenneth S. Collins, Steven Lane, Gonzalo Monroy +1 more | 2020-07-07 | $29,619,000 |
| 10544505 | Deposition or treatment of diamond-like carbon in a plasma reactor | Yang Yang, Kartik Ramaswamy, Kenneth S. Collins, Steven Lane, Gonzalo Monroy +1 more | 2020-01-28 | $24,189,000 |
| 10249495 | Diamond like carbon layer formed by an electron beam plasma process | Yang Yang, Jie Zhou, Kartik Ramaswamy, Kenneth S. Collins, Srinivas D. Nemani +5 more | 2019-04-02 | $31,503,000 |
| 9852923 | Mask etch for patterning | Gene Lee | 2017-12-26 | $19,032,000 |