Issued Patents All Time
Showing 25 most recent of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11651966 | Methods and apparatus for processing a substrate | Kartik Ramaswamy, Yang Yang, Kenneth S. Collins, Gonzalo Monroy, Yue Guo | 2023-05-16 |
| 11043375 | Plasma deposition of carbon hardmask | Yang Yang, Eswaranand Venkatasubramanian, Kartik Ramaswamy, Kenneth S. Collins, Gonzalo Monroy +2 more | 2021-06-22 |
| 11043387 | Methods and apparatus for processing a substrate | Kartik Ramaswamy, Yang Yang, Kenneth S. Collins, Gonzalo Monroy, Yue Guo | 2021-06-22 |
| 10957518 | Chamber with individually controllable plasma generation regions for a reactor for processing a workpiece | Kartik Ramaswamy, Lawrence Wong, Yang Yang, Srinivas D. Nemani, Praburam Gopalraja | 2021-03-23 |
| 10790153 | Methods and apparatus for electron beam etching process | Yue Guo, Yang Yang, Kartik Ramaswamy, Kenneth S. Collins, Gonzalo Monroy +1 more | 2020-09-29 |
| 10784085 | Plasma processing reactor with a magnetic electron-blocking filter external of the chamber and uniform field within the chamber | Kartik Ramaswamy, Kenneth S. Collins, Yang Yang, Lawrence Wong | 2020-09-22 |
| 10707086 | Etching methods | Yang Yang, Kartik Ramaswamy, Kenneth S. Collins, Gonzalo Monroy, Lucy Chen +1 more | 2020-07-07 |
| 10544505 | Deposition or treatment of diamond-like carbon in a plasma reactor | Yang Yang, Kartik Ramaswamy, Kenneth S. Collins, Gonzalo Monroy, Lucy Chen +1 more | 2020-01-28 |
| 10395904 | Method of real time in-situ chamber condition monitoring using sensors and RF communication | Lawrence Wong, Kartik Ramaswamy, Yang Yang, Richard Fovell | 2019-08-27 |
| 10249479 | Magnet configurations for radial uniformity tuning of ICP plasmas | Joseph AuBuchon, Tza-Jing Gung, Travis Koh, Nattaworn Boss Nunta, Sheng-Chin Kung +2 more | 2019-04-02 |
| 10249495 | Diamond like carbon layer formed by an electron beam plasma process | Yang Yang, Lucy Chen, Jie Zhou, Kartik Ramaswamy, Kenneth S. Collins +5 more | 2019-04-02 |
| 10170278 | Inductively coupled plasma source | Andrew Nguyen, Kartik Ramaswamy, Yang Yang | 2019-01-01 |
| 10153139 | Multiple electrode substrate support assembly and phase control system | Yang Yang, Kartik Ramaswamy, Lawrence Wong, Shahid Rauf, Andrew Nguyen +2 more | 2018-12-11 |
| 10141166 | Method of real time in-situ chamber condition monitoring using sensors and RF communication | Lawrence Wong, Kartik Ramaswamy, Yang Yang, Richard Fovell | 2018-11-27 |
| 10115566 | Method and apparatus for controlling a magnetic field in a plasma chamber | Tza-Jing Gung, Kartik Ramaswamy, Travis Koh, Joseph AuBuchon, Yang Yang | 2018-10-30 |
| 10017857 | Method and apparatus for controlling plasma near the edge of a substrate | Andrew Nguyen, Yang Yang, Kartik Ramaswamy, Lawrence Wong | 2018-07-10 |
| 9721760 | Electron beam plasma source with reduced metal contamination | Leonid Dorf, Shahid Rauf, Kenneth S. Collins, Kartik Ramaswamy, Nipun Misra +2 more | 2017-08-01 |
| 9659751 | System and method for selective coil excitation in inductively coupled plasma processing reactors | Kartik Ramaswamy, Yang Yang, Lawrence Wong, Joseph AuBuchon, Travis Koh | 2017-05-23 |
| 9613783 | Method and apparatus for controlling a magnetic field in a plasma chamber | Tza-Jing Gung, Kartik Ramaswamy, Travis Koh, Joseph AuBuchon, Yang Yang | 2017-04-04 |
| 9564297 | Electron beam plasma source with remote radical source | Ming-Feng Wu, Leonid Dorf, Shahid Rauf, Ying Zhang, Kenneth S. Collins +2 more | 2017-02-07 |
| 9472379 | Method of multiple zone symmetric gas injection for inductively coupled plasma | Yang Yang, Kartik Ramaswamy, Lawrence Wong | 2016-10-18 |
| 9449794 | Symmetrical inductively coupled plasma source with side RF feeds and spiral coil antenna | Andrew Nguyen, Kartik Ramaswamy, Jason A. Kenney, Shahid Rauf, Kenneth S. Collins +2 more | 2016-09-20 |
| 9443700 | Electron beam plasma source with segmented suppression electrode for uniform plasma generation | Leonid Dorf, Shahid Rauf, Kenneth S. Collins, Nipun Misra, Kartik Ramaswamy +1 more | 2016-09-13 |
| 9412563 | Spatially discrete multi-loop RF-driven plasma source having plural independent zones | Kartik Ramaswamy, Kenneth S. Collins, Shahid Rauf, Yang Yang, Lawrence Wong | 2016-08-09 |
| 9111722 | Three-coil inductively coupled plasma source with individually controlled coil currents from a single RF power generator | Leonid Dorf, Shahid Rauf, Jonathan Liu, Jason A. Kenney, Andrew Nguyen +2 more | 2015-08-18 |