Issued Patents All Time
Showing 26–27 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9082591 | Three-coil inductively coupled plasma source with individually controlled coil currents from a single RF power generator | Leonid Dorf, Shahid Rauf, Jonathan Liu, Jason A. Kenney, Andrew Nguyen +2 more | 2015-07-14 |
| 8734664 | Method of differential counter electrode tuning in an RF plasma reactor | Yang Yang, Kartik Ramaswamy, Kenneth S. Collins, Douglas A. Buchberger, Jr., Lawrence Wong +1 more | 2014-05-27 |