Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9161428 | Independent control of RF phases of separate coils of an inductively coupled plasma reactor | Kenneth S. Collins, Satoru Kobayashi, Lawrence Wong, Yang Yang, Kartik Ramaswamy +1 more | 2015-10-13 |
| 9111722 | Three-coil inductively coupled plasma source with individually controlled coil currents from a single RF power generator | Leonid Dorf, Shahid Rauf, Jason A. Kenney, Andrew Nguyen, Kenneth S. Collins +2 more | 2015-08-18 |
| 9082591 | Three-coil inductively coupled plasma source with individually controlled coil currents from a single RF power generator | Leonid Dorf, Shahid Rauf, Jason A. Kenney, Andrew Nguyen, Kenneth S. Collins +2 more | 2015-07-14 |
| 6486819 | Circuitry with resistive input impedance for generating pulses from analog waveforms | Jurianto Joe, Siong Siew Yong, Kin Mun Lye | 2002-11-26 |