Issued Patents All Time
Showing 25 most recent of 62 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400845 | Ion energy control on electrodes in a plasma reactor | Yue Guo, Haitao Wang, Kartik Ramaswamy | 2025-08-26 |
| 12368020 | Pulsed voltage source for plasma processing applications | A N M Wasekul AZAD, Kartik Ramaswamy, Yue Guo, Fernando Silveira | 2025-07-22 |
| 12347647 | Plasma excitation with ion energy control | Yue Guo, Kartik Ramaswamy | 2025-07-01 |
| 12334304 | System and methods for implementing a micro pulsing scheme using dual independent pulsers | A N M Wasekul AZAD, Kartik Ramaswamy, Yue Guo, Nicolas Bright | 2025-06-17 |
| 12334383 | Substrate support gap pumping to prevent glow discharge and light-up | James D. Carducci, Kenneth S. Collins, Michael R. Rice, Kartik Ramaswamy, Silverst Rodrigues | 2025-06-17 |
| 12293897 | Radio frequency diverter assembly enabling on-demand different spatial | Kartik Ramaswamy, Yue Guo, A N M Wasekul AZAD, Nicolas Bright | 2025-05-06 |
| 12272524 | Wideband variable impedance load for high volume manufacturing qualification and on-site diagnostics | Yue Guo, Kartik Ramaswamy, Jie Yu | 2025-04-08 |
| 12266506 | Scanning impedance measurement in a radio frequency plasma processing chamber | Yue Guo, Kartik Ramaswamy, Nicolas Bright, A N M Wasekul AZAD | 2025-04-01 |
| 12261019 | Voltage pulse time-domain multiplexing | Kartik Ramaswamy, Yue Guo | 2025-03-25 |
| 12205797 | Solid-state switch based high-speed pulser with plasma IEDF modification capability through multilevel output functionality | Kartik Ramaswamy, Yue Guo, Fernando Silveira, A. N. M. Wasekul Azad | 2025-01-21 |
| 12195830 | Aluminum alloy, preparation method, and aluminum alloy structural member | Qiang Guo, Xiaodong Wang, Mengjue Liao | 2025-01-14 |
| 12136537 | Cost effective radio frequency impedance matching networks | Yue Guo, Kartik Ramaswamy, Farhad Moghadam | 2024-11-05 |
| 12130561 | Gas distribution plate with UV blocker | Kartik Ramaswamy, Michael D. Willwerth | 2024-10-29 |
| 12125689 | Methods and apparatus for toroidal plasma generation | Kartik Ramaswamy, Andrew Nguyen, Sathya Swaroop Ganta, Fernando Silveira, Yue Guo +1 more | 2024-10-22 |
| 12111341 | In-situ electric field detection method and apparatus | Yue Guo, Kartik Ramaswamy, Fernando Silveira, A N M Wasekul AZAD | 2024-10-08 |
| 12106938 | Distortion current mitigation in a radio frequency plasma processing chamber | Yue Guo, Kartik Ramaswamy | 2024-10-01 |
| 12046449 | Methods and apparatus for processing a substrate | Yue Guo, Katsumasa Kawasaki, Kartik Ramaswamy, Nicolas Bright | 2024-07-23 |
| 12020901 | RF impedance matching networks for substrate processing platform | Yue Guo, Krishna Kumar Kuttannair, Jie Yu, Kartik Ramaswamy | 2024-06-25 |
| 11972924 | Pulsed voltage source for plasma processing applications | A N M Wasekul AZAD, Kartik Ramaswamy, Yue Guo, Fernando Silveira | 2024-04-30 |
| 11967483 | Plasma excitation with ion energy control | Yue Guo, Kartik Ramaswamy | 2024-04-23 |
| 11823868 | Hardware switch on main feed line in a radio frequency plasma processing chamber | Yue Guo, Kartik Ramaswamy | 2023-11-21 |
| 11810760 | Apparatus and method of ion current compensation | Yue Guo, Kartik Ramaswamy | 2023-11-07 |
| 11784042 | Carbon hard masks for patterning applications and methods related thereto | Eswaranand Venkatasubramanian, Pramit Manna, Kartik Ramaswamy, Takehito Koshizawa, Abhijit Basu Mallick | 2023-10-10 |
| 11776788 | Pulsed voltage boost for substrate processing | Yue Guo, Kartik Ramaswamy | 2023-10-03 |
| 11721525 | Sensorless RF impedance matching network | Yue Guo, Kartik Ramaswamy | 2023-08-08 |