Issued Patents All Time
Showing 25 most recent of 41 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12334304 | System and methods for implementing a micro pulsing scheme using dual independent pulsers | A N M Wasekul AZAD, Kartik Ramaswamy, Yue Guo, Yang Yang | 2025-06-17 |
| 12293897 | Radio frequency diverter assembly enabling on-demand different spatial | Kartik Ramaswamy, Yue Guo, A N M Wasekul AZAD, Yang Yang | 2025-05-06 |
| 12266506 | Scanning impedance measurement in a radio frequency plasma processing chamber | Yue Guo, Kartik Ramaswamy, Yang Yang, A N M Wasekul AZAD | 2025-04-01 |
| 12049961 | Chamber body design architecture for next generation advanced plasma technology | Bradley J. Howard, Andrew Nguyen | 2024-07-30 |
| 12046449 | Methods and apparatus for processing a substrate | Yue Guo, Katsumasa Kawasaki, Kartik Ramaswamy, Yang Yang | 2024-07-23 |
| 11333246 | Chamber body design architecture for next generation advanced plasma technology | Andrew Nguyen, Bradley J. Howard | 2022-05-17 |
| 9076844 | Process integration scheme to lower overall dielectric constant in BEoL interconnect structures | David Hemker, Fritz Redeker, Yezdi Dordi | 2015-07-07 |
| 8871650 | Post etch treatment (PET) of a low-K dielectric film | Srinivas D. Nemani, Thorsten Lill, Yifeng Zhou, Jamie Saephan, Ellie Yieh | 2014-10-28 |
| 7899627 | Automatic dynamic baseline creation and adjustment | Chung-Ho Huang, Jackie Seto | 2011-03-01 |
| 7542820 | Methods and arrangement for creating recipes using best-known methods | Chung-Ho Huang, Shih-Jeun Fan, Chin-Chuan Chang | 2009-06-02 |
| 7539969 | Computer readable mask shrink control processor | S. M. Reza Sadjadi | 2009-05-26 |
| 7521358 | Process integration scheme to lower overall dielectric constant in BEoL interconnect structures | Dave Hemker, Fritz Redeker, Yezdi Dordi | 2009-04-21 |
| 7501339 | Methods for making dual-damascene dielectric structures | Jay E. Uglow, Dave Hemker, Kenneth P. MacWilliams, Jeffrey C. Benzing, Timothy M. Archer | 2009-03-10 |
| 7465525 | Reticle alignment and overlay for multiple reticle process | S. M. Reza Sadjadi | 2008-12-16 |
| 7309618 | Method and apparatus for real time metal film thickness measurement | Yehiel Gotkis, Rodney Kistler, Aleksander Owczarz, David Hemker | 2007-12-18 |
| 7254510 | Smart component-based management techniques in a substrate processing system | Neil Benjamin, Richard A. Gottscho, Robert Steger | 2007-08-07 |
| 7152011 | Smart component-based management techniques in a substrate processing system | Neil Benjamin, Richard A. Gottscho, Robert Steger | 2006-12-19 |
| 7084621 | Enhancement of eddy current based measurement capabilities | Yehiel Gotkis, Rodney Kistler, Aleksander Owczarz, David Hemker | 2006-08-01 |
| 7060605 | Methods for making dual-damascene dielectric structures | Jay E. Uglow, Dave Hemker, Kenneth P. MacWilliams, Jeffrey C. Benzing, Timothy M. Archer | 2006-06-13 |
| 7029368 | Apparatus for controlling wafer temperature in chemical mechanical polishing | David Hemker | 2006-04-18 |
| 7010468 | Method and apparatus for slope to threshold conversion for process state monitoring and endpoint detection | Yehiel Gotkis, Vladimir Katz, David Hemker, Rodney Kistler | 2006-03-07 |
| 6984162 | Apparatus methods for controlling wafer temperature in chemical mechanical polishing | David Hemker | 2006-01-10 |
| 6951624 | Method and apparatus of arrayed sensors for metrological control | Yehiel Gotkis, Rodney Kistler, Aleksander Owczarz, David Hemker | 2005-10-04 |
| 6929531 | System and method for metal residue detection and mapping within a multi-step sequence | Yehiel Gotkis, Aleksander Owczarz, David Hemker, Rodney Kistler | 2005-08-16 |
| 6922053 | Complementary sensors metrological process and method and apparatus for implementing the same | Yehiel Gotkis, Rodney Kistler, Aleksander Owczarz, David Hemker | 2005-07-26 |