Issued Patents All Time
Showing 25 most recent of 48 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9824904 | Method and apparatus for controlling spatial temperature distribution | Neil Benjamin | 2017-11-21 |
| 8963052 | Method for controlling spatial temperature distribution across a semiconductor wafer | Neil Benjamin | 2015-02-24 |
| 8921740 | Method and apparatus for controlling the spatial temperature distribution across the surface of a workpiece support | Neil Benjamin | 2014-12-30 |
| 8747559 | Substrate support having dynamic temperature control | — | 2014-06-10 |
| 8536494 | Method and apparatus for controlling the spatial temperature distribution across the surface of a workpiece support | Neil Benjamin | 2013-09-17 |
| 7993460 | Substrate support having dynamic temperature control | — | 2011-08-09 |
| 7939784 | Electrostatic chuck support assembly | Keith Comendant | 2011-05-10 |
| 7869184 | Method of determining a target mesa configuration of an electrostatic chuck | — | 2011-01-11 |
| 7718932 | Electrostatic chuck having radial temperature control capability | — | 2010-05-18 |
| 7648582 | Cleaning of electrostatic chucks using ultrasonic agitation and applied electric fields | — | 2010-01-19 |
| 7501605 | Method of tuning thermal conductivity of electrostatic chuck support assembly | Keith Comendant | 2009-03-10 |
| 7480974 | Methods of making gas distribution members for plasma processing apparatuses | — | 2009-01-27 |
| 7282454 | Switched uniformity control | Richard A. Gottscho | 2007-10-16 |
| 7274004 | Method and apparatus for controlling the spatial temperature distribution across the surface of a workpiece support | Neil Benjamin | 2007-09-25 |
| 7254510 | Smart component-based management techniques in a substrate processing system | Neil Benjamin, Richard A. Gottscho, Nicolas Bright | 2007-08-07 |
| 7223321 | Faraday shield disposed within an inductively coupled plasma etching apparatus | Keith Comendant | 2007-05-29 |
| 7176403 | Method and apparatus for the compensation of edge ring wear in a plasma processing chamber | — | 2007-02-13 |
| 7161121 | Electrostatic chuck having radial temperature control capability | — | 2007-01-09 |
| 7152011 | Smart component-based management techniques in a substrate processing system | Neil Benjamin, Richard A. Gottscho, Nicolas Bright | 2006-12-19 |
| 6976782 | Methods and apparatus for in situ substrate temperature monitoring | — | 2005-12-20 |
| 6952255 | System and method for integrated multi-use optical alignment | Andrew Perry, Neil Benjamin | 2005-10-04 |
| 6896765 | Method and apparatus for the compensation of edge ring wear in a plasma processing chamber | — | 2005-05-24 |
| 6858265 | Technique for improving chucking reproducibility | Fred C. Redeker, Shijian Li | 2005-02-22 |
| 6847014 | Method and apparatus for controlling the spatial temperature distribution across the surface of a workpiece support | Neil Benjamin | 2005-01-25 |
| 6805952 | Low contamination plasma chamber components and methods for making the same | Christopher C. Chang | 2004-10-19 |