Robert Steger — 48 Patents at Lam Research

Robert Steger has been granted 48 US patents while listed as an inventor at Lam Research. The first was granted in 1992 and the most recent in November 2017. Robert Steger ranks #57,596 of 4,157,543 US inventors in our database (top 1.4%). Patent records list Robert Steger in San Jose, CA, US.

Issued Patents All Time

Showing 1–25 of 48 patents

Patent #	Title	Co-Inventors	Date	Approx Value ⓘ
9824904	Method and apparatus for controlling spatial temperature distribution	Neil Benjamin	2017-11-21	$24,021,000
8963052	Method for controlling spatial temperature distribution across a semiconductor wafer	Neil Benjamin	2015-02-24	$37,061,000
8921740	Method and apparatus for controlling the spatial temperature distribution across the surface of a workpiece support	Neil Benjamin	2014-12-30	$35,693,000
8747559	Substrate support having dynamic temperature control	—	2014-06-10	$20,157,000
8536494	Method and apparatus for controlling the spatial temperature distribution across the surface of a workpiece support	Neil Benjamin	2013-09-17	$6,583,000
7993460	Substrate support having dynamic temperature control	—	2011-08-09	$15,422,000
7939784	Electrostatic chuck support assembly	Keith Comendant	2011-05-10	$9,663,000
7869184	Method of determining a target mesa configuration of an electrostatic chuck	—	2011-01-11	$13,608,000
7718932	Electrostatic chuck having radial temperature control capability	—	2010-05-18	$18,068,000
7648582	Cleaning of electrostatic chucks using ultrasonic agitation and applied electric fields	—	2010-01-19	$8,291,000
7501605	Method of tuning thermal conductivity of electrostatic chuck support assembly	Keith Comendant	2009-03-10	$14,080,000
7480974	Methods of making gas distribution members for plasma processing apparatuses	—	2009-01-27	$9,306,000
7282454	Switched uniformity control	Richard A. Gottscho	2007-10-16	$25,670,000
7274004	Method and apparatus for controlling the spatial temperature distribution across the surface of a workpiece support	Neil Benjamin	2007-09-25	$24,441,000
7254510	Smart component-based management techniques in a substrate processing system	Neil Benjamin, Richard A. Gottscho, Nicolas Bright	2007-08-07	$13,488,000
7223321	Faraday shield disposed within an inductively coupled plasma etching apparatus	Keith Comendant	2007-05-29	$63,094,000
7176403	Method and apparatus for the compensation of edge ring wear in a plasma processing chamber	—	2007-02-13	$61,244,000
7161121	Electrostatic chuck having radial temperature control capability	—	2007-01-09	$24,466,000
7152011	Smart component-based management techniques in a substrate processing system	Neil Benjamin, Richard A. Gottscho, Nicolas Bright	2006-12-19	$67,848,000
6976782	Methods and apparatus for in situ substrate temperature monitoring	—	2005-12-20	$9,374,000
6952255	System and method for integrated multi-use optical alignment	Andrew Perry, Neil Benjamin	2005-10-04	$7,543,000
6896765	Method and apparatus for the compensation of edge ring wear in a plasma processing chamber	—	2005-05-24	$8,033,000
6858265	Technique for improving chucking reproducibility	Fred C. Redeker, Shijian Li	2005-02-22	$18,056,000
6847014	Method and apparatus for controlling the spatial temperature distribution across the surface of a workpiece support	Neil Benjamin	2005-01-25	$12,763,000
6805952	Low contamination plasma chamber components and methods for making the same	Christopher C. Chang	2004-10-19	$12,116,000

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Robert Steger — 48 Patents

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