Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Cleaning of electrostatic chucks using ultrasonic agitation and applied electric fields

Cleaning of electrostatic chucks using ultrasonic agitation and applied electric fields

US Patent 7648582 · Granted Jan 19, 2010

Estimated economic value: $8,291,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method and apparatus for controlling spatial temperature distribution2017
Method for controlling spatial temperature distribution across a semiconductor w2015
Method and apparatus for controlling the spatial temperature distribution across2014
Substrate support having dynamic temperature control2014
Method and apparatus for controlling the spatial temperature distribution across2013
Substrate support having dynamic temperature control2011
Electrostatic chuck support assembly2011
Method of determining a target mesa configuration of an electrostatic chuck2011
Electrostatic chuck having radial temperature control capability2010
Method of tuning thermal conductivity of electrostatic chuck support assembly2009
Methods of making gas distribution members for plasma processing apparatuses2009
Switched uniformity control2007