Issued Patents All Time
Showing 25 most recent of 78 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12368057 | Enhanced closed loop gas based heat exchange | John Drewery | 2025-07-22 |
| 12283462 | Control of plasma formation by RF coupling structures | Hema Swaroop Mopidevi, Lee Chen, Thomas W. Anderson, Shaun Smith | 2025-04-22 |
| 12237155 | Magnetic shielding for plasma sources | Hema Swaroop Mopidevi, John Pease, Thomas W. Anderson | 2025-02-25 |
| 12198896 | Compact high density plasma source | Roger Patrick, Lee Chen, Alan M. Schoepp, Clint Thomas, Thomas W. Anderson +1 more | 2025-01-14 |
| 11676798 | Cooling for a plasma-based reactor | John Drewery | 2023-06-13 |
| 11177067 | Magnetic shielding for plasma sources | Hema Swaroop Mopidevi, John Pease, Thomas W. Anderson | 2021-11-16 |
| 11101107 | Ceramic layer for electrostatic chuck including embedded faraday cage for RF delivery and associated methods | Henry Povolny, Anthony J. Ricci | 2021-08-24 |
| 10896808 | Maintenance mode power supply system | John Pease | 2021-01-19 |
| 10892179 | Electrostatic chuck including clamp electrode assembly forming portion of Faraday cage for RF delivery and associated methods | Henry Povolny, Anthony J. Ricci | 2021-01-12 |
| 10812033 | High-power radio-frequency spiral-coil filter | Sean O'Brien, Seyed Jafar Jafarian-Tehrani, Hema Swaroop Mopidevi, Jason Augustino | 2020-10-20 |
| 10770363 | Power switching system for ESC with array of thermal control elements | Keith Gaff, Tom Anderson, Keith Comendant, Ralph Jan-Pin Lu, Paul Gordon Robertson +1 more | 2020-09-08 |
| 10720346 | Substrate support with thermal zones for semiconductor processing | Harmeet Singh, Keith Gaff, Keith Comendant | 2020-07-21 |
| 10475623 | Ceramic layer for electrostatic chuck including embedded faraday cage for RF delivery and associated methods | Henry Povolny, Anthony J. Ricci | 2019-11-12 |
| 10460914 | Ferrite cage RF isolator for power circuitry | Hema Swaroop Mopidevi, John Pease, Thomas W. Anderson | 2019-10-29 |
| 10403475 | Tunable multi-zone gas injection system | David Cooperberg, Vahid Vahedi, Douglas Ratto, Harmeet Singh | 2019-09-03 |
| 10395901 | Plasma ignition and sustaining apparatus | Andreas Fischer | 2019-08-27 |
| 10276348 | Methods and apparatus for a hybrid capacitively-coupled and an inductively-coupled plasma processing system | Alexei Marakhtanov, Eric A. Hudson, Rajinder Dhindsa | 2019-04-30 |
| 10236193 | Substrate supports with multi-layer structure including independent operated heater zones | Harmeet Singh, Keith Gaff, Keith Comendant | 2019-03-19 |
| RE47276 | RF isolation for power circuitry | — | 2019-03-05 |
| 10192767 | Ceramic electrostatic chuck including embedded faraday cage for RF delivery and associated methods for operation, monitoring, and control | Henry Povolny, Anthony J. Ricci | 2019-01-29 |
| 10153136 | Hollow RF feed with coaxial DC power feed | Jason Augustino, John Drewery, Alex Paterson | 2018-12-11 |
| 10079168 | Ceramic electrostatic chuck including embedded Faraday cage for RF delivery and associated methods for operation, monitoring, and control | Henry Povolny, Anthony J. Ricci | 2018-09-18 |
| 10049948 | Power switching system for ESC with array of thermal control elements | Keith Gaff, Tom Anderson, Keith Comendant, Ralph Jan-Pin Lu, Paul Gordon Robertson +1 more | 2018-08-14 |
| 10014161 | Electrostatic chuck including embedded faraday cage for RF delivery and associated methods for operation, monitoring, and control | Henry Povolny, Anthony J. Ricci | 2018-07-03 |
| 9997381 | Hybrid edge ring for plasma wafer processing | Brian McMillin, Arthur H. Sato | 2018-06-12 |