Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10403475 | Tunable multi-zone gas injection system | Vahid Vahedi, Douglas Ratto, Harmeet Singh, Neil Benjamin | 2019-09-03 |
| 9051647 | Tunable multi-zone gas injection system | Valid Vahedi, Douglas Ratto, Harmeet Singh, Neil Benjamin | 2015-06-09 |
| 8425682 | High strip rate downstream chamber | Ing-Yann Albert Wang, Jaroslaw W. Winniczek, Erik A. Edelberg, Robert Chebi | 2013-04-23 |
| 8298336 | High strip rate downstream chamber | Ing-Yann Albert Wang, Jaroslaw W. Winniczek, Erik A. Edelberg, Robert Chebi | 2012-10-30 |
| 7932181 | Edge gas injection for critical dimension uniformity improvement | Harmeet Singh, Vahid Vahedi | 2011-04-26 |
| 7571697 | Plasma processor coil | Neil Benjamin | 2009-08-11 |
| RE39534 | Method and apparatus to calibrate a semi-empirical process simulator | Richard A. Gottscho, Vahid Vahedi | 2007-03-27 |
| 7139632 | Enhanced process and profile simulator algorithms | Vahid Vahedi | 2006-11-21 |
| 6804572 | Enhanced process and profile simulator algorithms | Vahid Vahedi | 2004-10-12 |
| 6577915 | Applications of a semi-empirical, physically based, profile simulator | Vahid Vahedi | 2003-06-10 |
| 6344105 | Techniques for improving etch rate uniformity | John Daugherty, Neil Benjamin, Jeff A. Bogart, Vahid Vahedi, Alan J. Miller +1 more | 2002-02-05 |
| 6301510 | Method and apparatus to calibrate a semi-empirical process simulator | Richard A. Gottscho, Vahid Vahedi | 2001-10-09 |