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Tunable multi-zone gas injection system |
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| 9051647 |
Tunable multi-zone gas injection system |
Valid Vahedi, Douglas Ratto, Harmeet Singh, Neil Benjamin |
2015-06-09 |
| 8425682 |
High strip rate downstream chamber |
Ing-Yann Albert Wang, Jaroslaw W. Winniczek, Erik A. Edelberg, Robert Chebi |
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| 8298336 |
High strip rate downstream chamber |
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2012-10-30 |
| 7932181 |
Edge gas injection for critical dimension uniformity improvement |
Harmeet Singh, Vahid Vahedi |
2011-04-26 |
| 7571697 |
Plasma processor coil |
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2009-08-11 |
| RE39534 |
Method and apparatus to calibrate a semi-empirical process simulator |
Richard A. Gottscho, Vahid Vahedi |
2007-03-27 |
| 7139632 |
Enhanced process and profile simulator algorithms |
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2006-11-21 |
| 6804572 |
Enhanced process and profile simulator algorithms |
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2004-10-12 |
| 6577915 |
Applications of a semi-empirical, physically based, profile simulator |
Vahid Vahedi |
2003-06-10 |
| 6344105 |
Techniques for improving etch rate uniformity |
John Daugherty, Neil Benjamin, Jeff A. Bogart, Vahid Vahedi, Alan J. Miller +1 more |
2002-02-05 |
| 6301510 |
Method and apparatus to calibrate a semi-empirical process simulator |
Richard A. Gottscho, Vahid Vahedi |
2001-10-09 |
