Issued Patents All Time
Showing 1–24 of 24 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11872050 | Image integrity and repeatability system | Meghan Patricia Conroy, David Chocron | 2024-01-16 |
| 11303868 | Image quality detection and correction system | David Chocron, Meghan Patricia Conroy | 2022-04-12 |
| 11116442 | Image integrity and repeatability system | Meghan Patricia Conroy, David Chocron | 2021-09-14 |
| 11050984 | Image quality detection and correction system | David Chocron, Meghan Patricia Conroy | 2021-06-29 |
| 9865472 | Fabrication of a silicon structure and deep silicon etch with profile control | Robert Chebi, Frank Y. Lin, Wan-Lin Chen, Erin Moore, Lily Zheng +3 more | 2018-01-09 |
| 9330926 | Fabrication of a silicon structure and deep silicon etch with profile control | Robert Chebi, Frank Y. Lin, Wan-Lin Chen, Erin McDonnell, Lily Zheng +3 more | 2016-05-03 |
| 9018098 | Silicon etch with passivation using chemical vapor deposition | Robert Chebi | 2015-04-28 |
| 8871105 | Method for achieving smooth side walls after Bosch etch process | Frank Y. Lin, Alan J. Miller, Qing Xu, Seongjun Heo, Jin-Hwan Ham +2 more | 2014-10-28 |
| 8757178 | Method and apparatus for removing photoresist | Robert Chebi | 2014-06-24 |
| 8609548 | Method for providing high etch rate | Qing Xu, Camelia Rusu, Frank Y. Lin, Alan J. Miller | 2013-12-17 |
| 8598037 | Silicon etch with passivation using plasma enhanced oxidation | Robert Chebi | 2013-12-03 |
| 8425682 | High strip rate downstream chamber | Ing-Yann Albert Wang, David Cooperberg, Erik A. Edelberg, Robert Chebi | 2013-04-23 |
| 8298336 | High strip rate downstream chamber | Ing-Yann Albert Wang, David Cooperberg, Erik A. Edelberg, Robert Chebi | 2012-10-30 |
| 8173547 | Silicon etch with passivation using plasma enhanced oxidation | Robert Chebi | 2012-05-08 |
| 8043434 | Method and apparatus for removing photoresist | Robert Chebi | 2011-10-25 |
| 7605063 | Photoresist stripping chamber and methods of etching photoresist on substrates | Robert Chebi, Alan J. Miller, Gladys Lo | 2009-10-20 |
| 7542134 | System, method and apparatus for in-situ substrate inspection | Aleksander Owczarz, Luai Nasser, Alan M. Schoepp, Fred C. Redeker, Erik A. Edelberg | 2009-06-02 |
| 7397555 | System, method and apparatus for in-situ substrate inspection | Aleksander Owczarz, Luai Nasser, Alan M. Schoepp, Fred C. Redeker, Erik A. Edelberg | 2008-07-08 |
| 6969619 | Full spectrum endpoint detection | — | 2005-11-29 |
| 6562187 | Methods and apparatus for determining an etch endpoint in a plasma processing system | M. J. Francois Chandrasekar Dassapa, Eric A. Hudson, Mark Wiepking | 2003-05-13 |
| 6489245 | Methods for reducing mask erosion during plasma etching | Vahid Vahedi | 2002-12-03 |
| 6255221 | Methods for running a high density plasma etcher to achieve reduced transistor device damage | Eric A. Hudson, Joel M. Cook, Helen L. Maynard | 2001-07-03 |
| 6228278 | Methods and apparatus for determining an etch endpoint in a plasma processing system | M. J. Francois Chandrasekar Dassapa, Eric A. Hudson, Mark Wiepking | 2001-05-08 |
| 6093332 | Methods for reducing mask erosion during plasma etching | Vahid Vahedi | 2000-07-25 |