Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7605063 | Photoresist stripping chamber and methods of etching photoresist on substrates | Robert Chebi, Jaroslaw W. Winniczek, Alan J. Miller | 2009-10-20 |
| 7083903 | Methods of etching photoresist on substrates | Erik A. Edelberg, Robert Chebi | 2006-08-01 |