Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8425682 | High strip rate downstream chamber | Jaroslaw W. Winniczek, David Cooperberg, Erik A. Edelberg, Robert Chebi | 2013-04-23 |
| 8298336 | High strip rate downstream chamber | Jaroslaw W. Winniczek, David Cooperberg, Erik A. Edelberg, Robert Chebi | 2012-10-30 |
| 8048329 | Methods for implementing highly efficient plasma traps | Mohammad Kamarehi | 2011-11-01 |
| 7824519 | Variable volume plasma processing chamber and associated methods | Robert Chebi | 2010-11-02 |
| 7679024 | Highly efficient gas distribution arrangement for plasma tube of a plasma processing chamber | Mohammad Kamarehi | 2010-03-16 |
| 7562638 | Methods and arrangement for implementing highly efficient plasma traps | Mohammad Kamarehi | 2009-07-21 |
| 7554053 | Corrugated plasma trap arrangement for creating a highly efficient downstream microwave plasma system | Mohammad Kamarehi | 2009-06-30 |
| 7476291 | High chamber temperature process and chamber design for photo-resist stripping and post-metal etch passivation | Robert Chebi | 2009-01-13 |