Issued Patents All Time
Showing 25 most recent of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12289820 | Method and apparatus for impedance matching in a power delivery system for remote plasma generation | Ilya Pokidov, Kenneth B. Trenholm, Fedir Viktorovych Teplyuk | 2025-04-29 |
| 11956885 | Method and apparatus for impedance matching in a power delivery system for remote plasma generation | Ilya Pokidov, Kenneth B. Trenholm, Fedir Viktorovych Teplyuk | 2024-04-09 |
| 11476092 | System and method of power generation with phase linked solid-state generator modules | Kenneth B. Trenholm, Mohamed Shaheen, Bryan Gallivan | 2022-10-18 |
| 11222770 | Microwave applicator with solid-state generator power source | Ken Trenholm, Colin August Sanford, Kevin W. Wenzel, Olivia Keller | 2022-01-11 |
| 10790118 | Microwave applicator with solid-state generator power source | Ken Trenholm, Colin August Sanford, Kevin W. Wenzel, Olivia Keller | 2020-09-29 |
| 9831066 | Compact microwave plasma applicator utilizing conjoining electric fields | Chaolin Hu, Olivia Keller | 2017-11-28 |
| 8048329 | Methods for implementing highly efficient plasma traps | Ing-Yann Albert Wang | 2011-11-01 |
| 7679024 | Highly efficient gas distribution arrangement for plasma tube of a plasma processing chamber | Ing-Yann Albert Wang | 2010-03-16 |
| 7638004 | Method for cleaning microwave applicator tube | Hong Shih, Harmeet Singh, Raphael Casaes, Duane Outka | 2009-12-29 |
| 7562638 | Methods and arrangement for implementing highly efficient plasma traps | Ing-Yann Albert Wang | 2009-07-21 |
| 7554053 | Corrugated plasma trap arrangement for creating a highly efficient downstream microwave plasma system | Ing-Yann Albert Wang | 2009-06-30 |
| 7183514 | Helix coupled remote plasma source | — | 2007-02-27 |
| 6439155 | Remote plasma generator with sliding short tuner | Gerald M. Cox | 2002-08-27 |
| 6412438 | Downstream sapphire elbow joint for remote plasma generator | Gerald M. Cox | 2002-07-02 |
| 6352050 | Remote plasma mixer | Gerald M. Cox | 2002-03-05 |
| 6263830 | Microwave choke for remote plasma generator | Gerald M. Cox | 2001-07-24 |
| 6031320 | Device for cooling electrodeless lamp with supersonic outlet jets and a staggered manifold | Aseem K. Srivastava, Robert D. Wooten | 2000-02-29 |
| 5961851 | Microwave plasma discharge device | Richard E. Pingree, Jr., Jianou Shi, Gerald M. Cox | 1999-10-05 |
| 5841242 | Electrodeless lamp with elimination of arc attachment | James E. Simpson | 1998-11-24 |
| 5831386 | Electrodeless lamp with improved efficacy | Brian Turner, Leslie Levine, Michael G. Ury | 1998-11-03 |
| 5767626 | Electrodeless lamp starting/operation with sources at different frequencies | Richard E. Pingree, Jr., Jianou Shi | 1998-06-16 |
| 5594303 | Apparatus for exciting an electrodeless lamp with an increasing electric field intensity | James E. Simpson, Michael G. Ury, Brian Turner | 1997-01-14 |
| 5498308 | Plasma asher with microwave trap | James E. Simpson | 1996-03-12 |
| 5227698 | Microwave lamp with rotating field | James E. Simpson | 1993-07-13 |
| 4954755 | Electrodeless lamp having hybrid cavity | Donald Lynch, Michael G. Ury, Charles H. Wood | 1990-09-04 |