Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9865472 | Fabrication of a silicon structure and deep silicon etch with profile control | Robert Chebi, Frank Y. Lin, Jaroslaw W. Winniczek, Wan-Lin Chen, Erin Moore +3 more | 2018-01-09 |
| 9330926 | Fabrication of a silicon structure and deep silicon etch with profile control | Robert Chebi, Frank Y. Lin, Jaroslaw W. Winniczek, Wan-Lin Chen, Erin McDonnell +3 more | 2016-05-03 |
| 7534363 | Method for providing uniform removal of organic material | Rao Annapragada, Odette Turmel, Kenji Takeshita, Thomas S. Choi, David R. Pirkle | 2009-05-19 |
| 6462349 | Measuring spacing between two surfaces via evanescent coupling | Yung-Chieh Hsieh, Roger A. Hajjar, Sanjai Parthasarathi | 2002-10-08 |