Issued Patents All Time
Showing 1–25 of 45 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12315732 | Method and apparatus for etching a semiconductor substrate in a plasma etch chamber | Daisuke Shimizu, Li Ling, Hikaru Watanabe | 2025-05-27 |
| 12278110 | Bias voltage modulation approach for SiO/SiN layer alternating etch process | Sean S. Kang, Olivier Luere, Sanghyuk CHOI, Mengnan ZOU, Zihao Ding | 2025-04-15 |
| 11495470 | Method of enhancing etching selectivity using a pulsed plasma | Hailong Zhou, Sean S. Kang, Rajinder Dhindsa, Taehwan Lee, Iljo Kwak | 2022-11-08 |
| 9443716 | Precise critical dimension control using bilayer ALD | Nobuhiro Sakamoto, Yoshihiro Takenaga, Li-Qun Xia, Mandyam Sriram | 2016-09-13 |
| 9395003 | Process and device for reducing radioactive material of object containing radioactive material to safe level in living environment | Shigeto Hayafuji, Takeshi Kamaya, Hiroshi Hayakawa, Yasuhiro Jinbo, Kaname Mogami +4 more | 2016-07-19 |
| 8946091 | Prevention of line bending and tilting for etch with tri-layer mask | Youn-Jin Oh, Hitoshi Takahashi | 2015-02-03 |
| 8936855 | Wood fiber board and manufacturing method thereof | Makoto Kimuro, Hiromasa Sinkai | 2015-01-20 |
| 8911590 | Integrated capacitive and inductive power sources for a plasma etching chamber | Rajinder Dhindsa, Mukund Srinivasan, Alexei Marakhtanov, Andreas Fischer | 2014-12-16 |
| 8801892 | Uniform etch system | Dean J. Larson, Babak Kadkhodayan, Di Wu, Bi-Ming Yen, Xingcai Su +2 more | 2014-08-12 |
| 8259763 | Laser gain medium and laser oscillator using the same | Shinya Ishii, Tomoko Saito, Junji Kawanaka, Noriaki Miyanaga, Kazuo Imazaki +2 more | 2012-09-04 |
| 8236188 | Method for low-K dielectric etch with reduced damage | Bing Ji, Andrew D. Bailey, III, Eric A. Hudson, Maryam Moravej, Stephen M. Sirard +6 more | 2012-08-07 |
| 8222155 | Selectivity control in a plasma processing system | Odette Turmel, Felix Kozakevich, Eric A. Hudson | 2012-07-17 |
| 8114780 | Method for dielectric material removal between conductive lines | Mayumi Block, Robert C. Hefty, Stephen M. Sirard | 2012-02-14 |
| 8068523 | Laser gain medium and laser oscillator using the same | Shinya Ishii, Tomoko Saito, Junji Kawanaka, Noriaki Miyanaga, Kazuo Imazaki +2 more | 2011-11-29 |
| 7892445 | Wafer electrical discharge control using argon free dechucking gas | David Wei, Howard Dang, Masahiro Watanabe, Sean S. Kang, Mayumi Block +2 more | 2011-02-22 |
| 7773641 | Optically pumped disk-type solid state laser oscillator and optically pumped disk-type solid state laser system | Shinya Ishii | 2010-08-10 |
| 7534363 | Method for providing uniform removal of organic material | Rao Annapragada, Odette Turmel, Lily Zheng, Thomas S. Choi, David R. Pirkle | 2009-05-19 |
| 7521362 | Methods for the optimization of ion energy control in a plasma processing system | Odette Turmel, Felix Kozakevich, Eric A. Hudson | 2009-04-21 |
| 7517801 | Method for selectivity control in a plasma processing system | — | 2009-04-14 |
| 7515168 | Laser scanning optical apparatus having exclusive optical elements at varying distances from receiving surfaces | Atsushi Ohata, Hajime Taniguchi | 2009-04-07 |
| 7371332 | Uniform etch system | Dean J. Larson, Babak Kadkhodayan, Di Wu, Bi-Ming Yen, Xingcai Su +2 more | 2008-05-13 |
| 7226869 | Methods for protecting silicon or silicon carbide electrode surfaces from morphological modification during plasma etch processing | Tsuyoshi Aso, Seiji Kawaguchi, Thomas McClard, Wan-Lin Chen, Enrico Magni +3 more | 2007-06-05 |
| 7169231 | Gas distribution system with tuning gas | Dean J. Larson, Babak Kadkhodayan, Di Wu, Bi-Ming Yen, Xingcai Su +2 more | 2007-01-30 |
| 7090782 | Etch with uniformity control | Seiji Kawaguchi | 2006-08-15 |
| 7081407 | Method of preventing damage to porous low-k materials during resist stripping | Rao Annapragada | 2006-07-25 |