Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8574447 | Inorganic rapid alternating process for silicon etch | Camelia Rusu | 2013-11-05 |
| 7226869 | Methods for protecting silicon or silicon carbide electrode surfaces from morphological modification during plasma etch processing | Kenji Takeshita, Seiji Kawaguchi, Thomas McClard, Wan-Lin Chen, Enrico Magni +3 more | 2007-06-05 |
| 5151768 | Dielectric isolation substrate | — | 1992-09-29 |