Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7226869 | Methods for protecting silicon or silicon carbide electrode surfaces from morphological modification during plasma etch processing | Kenji Takeshita, Tsuyoshi Aso, Seiji Kawaguchi, Wan-Lin Chen, Enrico Magni +3 more | 2007-06-05 |