Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 11189496 | Plasma reactor for ultra-high aspect ratio etching and etching method thereof | Gerald Yin, Yichuan Zhang, Jie Liang, Tuqiang Ni | 2021-11-30 | |
| 8801892 | Uniform etch system | Dean J. Larson, Babak Kadkhodayan, Di Wu, Kenji Takeshita, Bi-Ming Yen +2 more | 2014-08-12 | $19,292,000 |
| 7371332 | Uniform etch system | Dean J. Larson, Babak Kadkhodayan, Di Wu, Kenji Takeshita, Bi-Ming Yen +2 more | 2008-05-13 | $38,829,000 |
| 7169231 | Gas distribution system with tuning gas | Dean J. Larson, Babak Kadkhodayan, Di Wu, Kenji Takeshita, Bi-Ming Yen +2 more | 2007-01-30 | $14,926,000 |
| 7041230 | Method for selectively etching organosilicate glass with respect to a doped silicon carbide | Bi-Ming Yen, Peter Loewenhardt | 2006-05-09 | $7,161,000 |