Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8911589 | Edge ring assembly with dielectric spacer ring | Jeremy Chang, Andreas Fischer | 2014-12-16 |
| 8900398 | Local plasma confinement and pressure control arrangement and methods thereof | Rajinder Dhindsa, Michael C. Kellogg, Andrew D. Bailey, III | 2014-12-02 |
| 8801892 | Uniform etch system | Dean J. Larson, Di Wu, Kenji Takeshita, Bi-Ming Yen, Xingcai Su +2 more | 2014-08-12 |
| 8500953 | Edge ring assembly with dielectric spacer ring | Jeremy Chang, Andreas Fischer | 2013-08-06 |
| 8465620 | Hollow anode plasma reactor and method | David W. Benzing | 2013-06-18 |
| 8402918 | Showerhead electrode with centering feature | Anthony de la Llera | 2013-03-26 |
| 8313805 | Clamped showerhead electrode assembly | Rajinder Dhindsa, Anthony de la Llera, Michael C. Kellogg | 2012-11-20 |
| 8206506 | Showerhead electrode | Rajinder Dhindsa, Anthony de la Llera, Michael C. Kellogg | 2012-06-26 |
| 8161906 | Clamped showerhead electrode assembly | Rajinder Dhindsa, Anthony de la Llera, Michael C. Kellogg | 2012-04-24 |
| 7371332 | Uniform etch system | Dean J. Larson, Di Wu, Kenji Takeshita, Bi-Ming Yen, Xingcai Su +2 more | 2008-05-13 |
| 7169231 | Gas distribution system with tuning gas | Dean J. Larson, Di Wu, Kenji Takeshita, Bi-Ming Yen, Xingcai Su +2 more | 2007-01-30 |
| 6974523 | Hollow anode plasma reactor and method | David W. Benzing | 2005-12-13 |
| 6242360 | Plasma processing system apparatus, and method for delivering RF power to a plasma processing | Andreas Fischer, Andras Kuthi | 2001-06-05 |
| 6132513 | Process chemistry resistant manometer | Andreas Fischer, Tienyu Sheng, Gregory A. Tomasch | 2000-10-17 |