Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8845855 | Electrode for plasma processes and method for manufacture and use thereof | Jerome S. Hubacek, Albert R. Ellingboe | 2014-09-30 |
| 8465620 | Hollow anode plasma reactor and method | Babak Kadkhodayan | 2013-06-18 |
| 7470627 | Wafer area pressure control for plasma confinement | Taejoon Han, Albert R. Ellingboe | 2008-12-30 |
| 6974523 | Hollow anode plasma reactor and method | Babak Kadkhodayan | 2005-12-13 |
| 6823815 | Wafer area pressure control for plasma confinement | Taejoon Han, Albert R. Ellingboe | 2004-11-30 |
| 6669253 | Wafer boat and boat holder | Christopher A. Luebker | 2003-12-30 |
| 6492774 | Wafer area pressure control for plasma confinement | Taejoon Han, Albert R. Ellingboe | 2002-12-10 |
| 4786352 | Apparatus for in-situ chamber cleaning | — | 1988-11-22 |
| 4657616 | In-situ CVD chamber cleaner | Jeffrey C. Benzing, Arthur Boren, Ching Chiang Tang | 1987-04-14 |
| 4572759 | Troide plasma reactor with magnetic enhancement | — | 1986-02-25 |