Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10503850 | Generation of a map of a substrate using iterative calculations of non-measured attribute data | Daniel Morvay | 2019-12-10 |
| 10215704 | Computed tomography using intersecting views of plasma using optical emission spectroscopy during plasma processing | Daniel Morvay, Mirko Vukovic | 2019-02-26 |
| 9401263 | Feature etching using varying supply of power pulses | Xiang Hu, Gabriel Padron Wells, Jack Chao-Hsu Chang, Mingmei Wang | 2016-07-26 |
| 9252238 | Semiconductor structures with coplanar recessed gate layers and fabrication methods | Kristina Trevino, Yuan-Hung Liu, Gabriel Padron Wells, Xing Zhang, Hoong Shing Wong +4 more | 2016-02-02 |
| 9147680 | Integrated circuits having replacement metal gates with improved threshold voltage performance and methods for fabricating the same | Kristina Trevino, Yuan-Hung Lin, Gabriel Padron Wells, Chang Ho Maeng, Hoong Shing Wong | 2015-09-29 |
| 9040380 | Integrated circuits having laterally confined epitaxial material overlying fin structures and methods for fabricating same | Xiang Hu, Jin Ping Liu, Jill C. Hildreth | 2015-05-26 |
| 9034767 | Facilitating mask pattern formation | Xiang Hu, Dae-Han Choi, Dae Geun Yang, Andy Wei | 2015-05-19 |
| 8940641 | Methods for fabricating integrated circuits with improved patterning schemes | Xiang Hu, Hui Peng Koh | 2015-01-27 |
| 8912633 | In-situ photoresist strip during plasma etching of active hard mask | Sangjun Cho, Tom Choi, Sean S. Kang, Prabhakara Gopaladasu, Bi-Ming Yen | 2014-12-16 |
| 8283255 | In-situ photoresist strip during plasma etching of active hard mask | Sangjun Cho, Tom Choi, Sean S. Kang, Prabhakara Gopaladasu, Bi-Ming Yen | 2012-10-09 |
| 8124516 | Trilayer resist organic layer etch | Sean S. Kang, Sang-Jun Cho, Tom Choi | 2012-02-28 |
| 7782591 | Methods of and apparatus for reducing amounts of particles on a wafer during wafer de-chucking | Sangjun Cho, Sean S. Kang, Tom Choi | 2010-08-24 |
| 7470627 | Wafer area pressure control for plasma confinement | David W. Benzing, Albert R. Ellingboe | 2008-12-30 |
| 7211518 | Waferless automatic cleaning after barrier removal | Xiaoqiang Yao, Bi-Ming Yen, Peter Loewenhardt | 2007-05-01 |
| 7001529 | Pre-endpoint techniques in photoresist etching | Xiaoqiang Yao | 2006-02-21 |
| 6823815 | Wafer area pressure control for plasma confinement | David W. Benzing, Albert R. Ellingboe | 2004-11-30 |
| 6492774 | Wafer area pressure control for plasma confinement | David W. Benzing, Albert R. Ellingboe | 2002-12-10 |