Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12217972 | Multi-state pulsing for achieving a balance between bow control and mask selectivity | Nikhil Dole, Merrett Wong, Eric A. Hudson, Sangheon Lee | 2025-02-04 |
| 7211518 | Waferless automatic cleaning after barrier removal | Bi-Ming Yen, Taejoon Han, Peter Loewenhardt | 2007-05-01 |
| 7001529 | Pre-endpoint techniques in photoresist etching | Taejoon Han | 2006-02-21 |
| 5236691 | Ternary metal-rich sulfide with a layered structure | Hugo F. Franzen | 1993-08-17 |