Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12278125 | Integrated dry processes for patterning radiation photoresist patterning | Jengyi Yu, Samantha Tan, Mohammed Haroon Alvi, Richard Wise, Yang Pan +5 more | 2025-04-15 |
| 12183604 | Integrated dry processes for patterning radiation photoresist patterning | Jengyi Yu, Samantha Tan, Mohammed Haroon Alvi, Richard Wise, Yang Pan +5 more | 2024-12-31 |
| 8845855 | Electrode for plasma processes and method for manufacture and use thereof | Albert R. Ellingboe, David W. Benzing | 2014-09-30 |
| 7517803 | Silicon parts having reduced metallic impurity concentration for plasma reaction chambers | Daxing Ren, Nicholas Webb | 2009-04-14 |
| 7442114 | Methods for silicon electrode assembly etch rate and etch uniformity recovery | Tuochuan Huang, Daxing Ren, Hong Shih, Catherine Zhou, Chun Yan +4 more | 2008-10-28 |
| 6846726 | Silicon parts having reduced metallic impurity concentration for plasma reaction chambers | Daxing Ren, Nicholas Webb | 2005-01-25 |
| 6475336 | Electrostatically clamped edge ring for plasma processing | — | 2002-11-05 |
| 6451157 | Gas distribution apparatus for semiconductor processing | — | 2002-09-17 |
| 6408786 | Semiconductor processing equipment having tiled ceramic liner | William S. Kennedy, Robert A. Maraschin | 2002-06-25 |
| 6376385 | Method of manufacturing assembly for plasma reaction chamber and use thereof | John Lilleland, William S. Kennedy | 2002-04-23 |
| 6194322 | Electrode for plasma processes and method for a manufacture and use thereof | John Lilleland, William S. Kennedy | 2001-02-27 |
| 6148765 | Electrode for plasma processes and method for manufacture and use thereof | John Lilleland, William S. Kennedy | 2000-11-21 |
| 6073577 | Electrode for plasma processes and method for manufacture and use thereof | John Lilleland, William S. Kennedy | 2000-06-13 |