Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8221608 | Proximity processing using controlled batch volume with an integrated proximity head | Carl Woods, Yezdi Dordi, Jacob Wylie | 2012-07-17 |
| 7862693 | Apparatus for plating semiconductor wafers | Yezdi Dordi, Fred C. Redeker, John M. Boyd, Carl Woods | 2011-01-04 |
| 7811423 | Proximity processing using controlled batch volume with an integrated proximity head | Carl Woods, Yezdi Dordi, Jacob Wylie | 2010-10-12 |
| 7648616 | Apparatus and method for semiconductor wafer electroplanarization | John M. Boyd, Fritz Redeker, Yezdi Dordi, Michael Ravkin | 2010-01-19 |
| 7645364 | Apparatus and method for plating semiconductor wafers | Yezdi Dordi, Fred C. Redeker, John M. Boyd, Carl Woods | 2010-01-12 |
| 6583064 | Low contamination high density plasma etch chambers and methods for making the same | Thomas E. Wicker, William S. Kennedy | 2003-06-24 |
| 6464843 | Contamination controlling method and apparatus for a plasma processing chamber | Thomas E. Wicker, Alan M. Schoepp | 2002-10-15 |
| 6408786 | Semiconductor processing equipment having tiled ceramic liner | William S. Kennedy, Jerome S. Hubacek | 2002-06-25 |
| 6394026 | Low contamination high density plasma etch chambers and methods for making the same | Thomas E. Wicker, William S. Kennedy | 2002-05-28 |
| 6306244 | Apparatus for reducing polymer deposition on substrate support | William S. Kennedy, Thomas E. Wicker, Joel M. Cook, Alan M. Schoepp | 2001-10-23 |
| 6251793 | Particle controlling method for a plasma processing chamber | Thomas E. Wicker | 2001-06-26 |
| 6227140 | Semiconductor processing equipment having radiant heated ceramic liner | William S. Kennedy, Thomas E. Wicker | 2001-05-08 |
| 6200415 | Load controlled rapid assembly clamp ring | — | 2001-03-13 |
| 6155203 | Apparatus for control of deposit build-up on an inner surface of a plasma processing chamber | William S. Kennedy, Albert Lamm, Thomas E. Wicker | 2000-12-05 |
| 6129808 | Low contamination high density plasma etch chambers and methods for making the same | Thomas E. Wicker, William S. Kennedy | 2000-10-10 |
| 6035868 | Method and apparatus for control of deposit build-up on an inner surface of a plasma processing chamber | William S. Kennedy, Albert Lamm, Thomas E. Wicker | 2000-03-14 |
| 5993594 | Particle controlling method and apparatus for a plasma processing chamber | Thomas E. Wicker | 1999-11-30 |
| 5863376 | Temperature controlling method and apparatus for a plasma processing chamber | Thomas E. Wicker, Joel M. Cook, William S. Kennedy, Neil Benjamin | 1999-01-26 |
| 5805408 | Electrostatic clamp with lip seal for clamping substrates | Paul Shufflebotham, Michael Barnes | 1998-09-08 |
| 5098741 | Method and system for delivering liquid reagents to processing vessels | Alan D. Nolet, Lloyd Wright | 1992-03-24 |