Issued Patents All Time
Showing 1–24 of 24 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7096819 | Inductive plasma processor having coil with plural windings and method of controlling plasma density | Jian J. Chen, Robert Veltrop | 2006-08-29 |
| 6881608 | Semiconductor processing equipment having improved process drift control | — | 2005-04-19 |
| 6673198 | Semiconductor processing equipment having improved process drift control | — | 2004-01-06 |
| 6583064 | Low contamination high density plasma etch chambers and methods for making the same | Robert A. Maraschin, William S. Kennedy | 2003-06-24 |
| 6583572 | Inductive plasma processor including current sensor for plasma excitation coil | Robert Veltrop, Jian J. Chen | 2003-06-24 |
| 6527912 | Stacked RF excitation coil for inductive plasma processor | Jian J. Chen, Robert Veltrop | 2003-03-04 |
| 6463875 | Multiple coil antenna for inductively-coupled plasma generation systems | Jian J. Chen, Robert Veltrop | 2002-10-15 |
| 6464843 | Contamination controlling method and apparatus for a plasma processing chamber | Alan M. Schoepp, Robert A. Maraschin | 2002-10-15 |
| 6394026 | Low contamination high density plasma etch chambers and methods for making the same | Robert A. Maraschin, William S. Kennedy | 2002-05-28 |
| 6306244 | Apparatus for reducing polymer deposition on substrate support | William S. Kennedy, Robert A. Maraschin, Joel M. Cook, Alan M. Schoepp | 2001-10-23 |
| 6251793 | Particle controlling method for a plasma processing chamber | Robert A. Maraschin | 2001-06-26 |
| 6227140 | Semiconductor processing equipment having radiant heated ceramic liner | William S. Kennedy, Robert A. Maraschin | 2001-05-08 |
| 6164241 | Multiple coil antenna for inductively-coupled plasma generation systems | Jian J. Chen, Robert Veltrop | 2000-12-26 |
| 6155199 | Parallel-antenna transformer-coupled plasma generation system | Jian J. Chen, Robert Veltrop | 2000-12-05 |
| 6155203 | Apparatus for control of deposit build-up on an inner surface of a plasma processing chamber | William S. Kennedy, Albert Lamm, Robert A. Maraschin | 2000-12-05 |
| 6129808 | Low contamination high density plasma etch chambers and methods for making the same | Robert A. Maraschin, William S. Kennedy | 2000-10-10 |
| 6035868 | Method and apparatus for control of deposit build-up on an inner surface of a plasma processing chamber | William S. Kennedy, Albert Lamm, Robert A. Maraschin | 2000-03-14 |
| 6033585 | Method and apparatus for preventing lightup of gas distribution holes | Albert Lamm, Vahid Vahedi | 2000-03-07 |
| 6028286 | Method for igniting a plasma inside a plasma processing reactor | Joel M. Cook, Jian J. Chen | 2000-02-22 |
| 5993594 | Particle controlling method and apparatus for a plasma processing chamber | Robert A. Maraschin | 1999-11-30 |
| 5863376 | Temperature controlling method and apparatus for a plasma processing chamber | Joel M. Cook, Robert A. Maraschin, William S. Kennedy, Neil Benjamin | 1999-01-26 |
| 5543184 | Method of reducing particulates in a plasma tool through steady state flows | Michael Barnes, Dennis K. Coultas, John C. Forster, John H. Keller | 1996-08-06 |
| 5518547 | Method and apparatus for reducing particulates in a plasma tool through steady state flows | Michael Barnes, Dennis K. Coultas, John C. Forster, John H. Keller | 1996-05-21 |
| 4724510 | Electrostatic wafer clamp | Roger B. Lachenbruch | 1988-02-09 |