| 7580279 |
Flash memory cells with reduced distances between cell elements |
Roger W. Lindsay, Frances May |
2009-08-25 |
| 7563723 |
Critical dimension control for integrated circuits |
Mirzafer Abatchev, David K. Hwang |
2009-07-21 |
| 7271106 |
Critical dimension control for integrated circuits |
Mirzafer Abatchev, David K. Hwang |
2007-09-18 |
| 7208407 |
Flash memory cells with reduced distances between cell elements |
Roger W. Lindsay, Frances May |
2007-04-24 |
| 7096819 |
Inductive plasma processor having coil with plural windings and method of controlling plasma density |
Jian J. Chen, Thomas E. Wicker |
2006-08-29 |
| 6716758 |
Aspect ratio controlled etch selectivity using time modulated DC bias voltage |
Kevin G. Donohoe, Mirzafer Abatchev |
2004-04-06 |
| 6583572 |
Inductive plasma processor including current sensor for plasma excitation coil |
Jian J. Chen, Thomas E. Wicker |
2003-06-24 |
| 6527912 |
Stacked RF excitation coil for inductive plasma processor |
Jian J. Chen, Thomas E. Wicker |
2003-03-04 |
| 6463875 |
Multiple coil antenna for inductively-coupled plasma generation systems |
Jian J. Chen, Thomas E. Wicker |
2002-10-15 |
| 6164241 |
Multiple coil antenna for inductively-coupled plasma generation systems |
Jian J. Chen, Thomas E. Wicker |
2000-12-26 |
| 6155199 |
Parallel-antenna transformer-coupled plasma generation system |
Jian J. Chen, Thomas E. Wicker |
2000-12-05 |
| 5589737 |
Plasma processor for large workpieces |
Michael Barnes, Neil M.P. Benjamin, John Holland, Richard D. Beer |
1996-12-31 |
