Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7580279 | Flash memory cells with reduced distances between cell elements | Roger W. Lindsay, Frances May | 2009-08-25 |
| 7563723 | Critical dimension control for integrated circuits | Mirzafer Abatchev, David K. Hwang | 2009-07-21 |
| 7271106 | Critical dimension control for integrated circuits | Mirzafer Abatchev, David K. Hwang | 2007-09-18 |
| 7208407 | Flash memory cells with reduced distances between cell elements | Roger W. Lindsay, Frances May | 2007-04-24 |
| 7096819 | Inductive plasma processor having coil with plural windings and method of controlling plasma density | Jian J. Chen, Thomas E. Wicker | 2006-08-29 |
| 6716758 | Aspect ratio controlled etch selectivity using time modulated DC bias voltage | Kevin G. Donohoe, Mirzafer Abatchev | 2004-04-06 |
| 6583572 | Inductive plasma processor including current sensor for plasma excitation coil | Jian J. Chen, Thomas E. Wicker | 2003-06-24 |
| 6527912 | Stacked RF excitation coil for inductive plasma processor | Jian J. Chen, Thomas E. Wicker | 2003-03-04 |
| 6463875 | Multiple coil antenna for inductively-coupled plasma generation systems | Jian J. Chen, Thomas E. Wicker | 2002-10-15 |
| 6164241 | Multiple coil antenna for inductively-coupled plasma generation systems | Jian J. Chen, Thomas E. Wicker | 2000-12-26 |
| 6155199 | Parallel-antenna transformer-coupled plasma generation system | Jian J. Chen, Thomas E. Wicker | 2000-12-05 |
| 5589737 | Plasma processor for large workpieces | Michael Barnes, Neil M.P. Benjamin, John Holland, Richard D. Beer | 1996-12-31 |