Issued Patents All Time
Showing 1–25 of 110 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7709343 | Use of a plasma source to form a layer during the formation of a semiconductor device | Thomas A. Figura, Thomas J. Dunbar | 2010-05-04 |
| 7608196 | Method of forming high aspect ratio apertures | David S. Becker | 2009-10-27 |
| 7507672 | Plasma etching system and method | Mirzafer Abatchev, Brad J. Howard | 2009-03-24 |
| 7429535 | Use of a plasma source to form a layer during the formation of a semiconductor device | Thomas A. Figura, Thomas J. Dunbar | 2008-09-30 |
| 7335964 | Semiconductor structures | Werner Juengling | 2008-02-26 |
| 7297637 | Use of pulsed grounding source in a plasma reactor | Chuck E. Hedberg | 2007-11-20 |
| 7294578 | Use of a plasma source to form a layer during the formation of a semiconductor device | Thomas A. Figura, Thomas J. Dunbar | 2007-11-13 |
| 7253117 | Methods for use of pulsed voltage in a plasma reactor | — | 2007-08-07 |
| 7183220 | Plasma etching methods | Guy T. Blalock, David S. Becker | 2007-02-27 |
| 7163641 | Method of forming high aspect ratio apertures | David S. Becker | 2007-01-16 |
| 7125804 | Etching methods and apparatus and substrate assemblies produced therewith | Rich Stocks | 2006-10-24 |
| 7114532 | Liner for use in processing chamber | — | 2006-10-03 |
| 7112533 | Plasma etching system and method | Mirzafer Abatchev, Brad J. Howard | 2006-09-26 |
| 7109112 | Method of providing a structure using self-aligned features | Dinesh Chopra, Cem Basceri | 2006-09-19 |
| 7074724 | Etchant and method of use | David S. Becker | 2006-07-11 |
| 7059267 | Use of pulsed grounding source in a plasma reactor | Chuck E. Hedberg | 2006-06-13 |
| 7033954 | Etching of high aspect ration structures | — | 2006-04-25 |
| 6960534 | Method for controlling the temperature of a gas distribution plate in a process reactor | Guy T. Blalock | 2005-11-01 |
| 6958297 | Plasma etching methods | David S. Becker, Bradley J. Howard | 2005-10-25 |
| 6946053 | Plasma reactor | — | 2005-09-20 |
| 6939813 | Apparatus for improved low pressure inductively coupled high density plasma reactor | Guy T. Blalock | 2005-09-06 |
| 6921725 | Etching of high aspect ratio structures | — | 2005-07-26 |
| 6909113 | Three-dimensional photonic band structures in solid materials | Joseph E. Geusic | 2005-06-21 |
| 6890863 | Etchant and method of use | David S. Becker | 2005-05-10 |
| 6890858 | Methods of forming materials over uneven surface topologies, and methods of forming insulative materials over and between conductive lines | Werner Juengling | 2005-05-10 |