Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5948704 | High flow vacuum chamber including equipment modules such as a plasma generating source, vacuum pumping arrangement and/or cantilevered substrate support | Jon P. Hylbert, Stefano Mangano | 1999-09-07 |
| 5589737 | Plasma processor for large workpieces | Michael Barnes, John Holland, Richard D. Beer, Robert Veltrop | 1996-12-31 |