Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7111467 | Ultra-low temperature closed-loop recirculating gas chilling system | Tamirisa Apparao, Oleg Podtcherniaev, Kevin Flynn, Paul Hall, Mikhail Boiarski | 2006-09-26 |
| 6772825 | Heat exchange support surface | Charles A. Lachenbruch | 2004-08-10 |
| 4801241 | Modular article processing machine and method of article handling therein | John Zajac, Ninko T. Mirkovich, Thomas M. Rathmann | 1989-01-31 |
| 4790258 | Magnetically coupled wafer lift pins | David J. Drage, Herbert G. Drake, Jr., Jerris H. Peavey | 1988-12-13 |
| 4786359 | Xenon enhanced plasma etch | Mark M. Stark, Shu Nakajima | 1988-11-22 |
| 4724510 | Electrostatic wafer clamp | Thomas E. Wicker | 1988-02-09 |
| 4619573 | Article transport apparatus | Thomas M. Rathmann, Herbert G. Drake, Jr., Ninko T. Mirkovich | 1986-10-28 |
| 4547248 | Automatic shutoff valve | John Zajac | 1985-10-15 |