Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4971653 | Temperature controlled chuck for elevated temperature etch processing | Gary Powell, Tony Sie | 1990-11-20 |
| 4793975 | Plasma Reactor with removable insert | — | 1988-12-27 |
| 4790258 | Magnetically coupled wafer lift pins | Roger B. Lachenbruch, Herbert G. Drake, Jr., Jerris H. Peavey | 1988-12-13 |
| 4780169 | Non-uniform gas inlet for dry etching apparatus | Mark M. Stark, Douglas H. Warenback | 1988-10-25 |
| 4697089 | Dual wavelength sensor which employs object as part of a corner reflector | — | 1987-09-29 |
| 4590042 | Plasma reactor having slotted manifold | — | 1986-05-20 |
| 4207466 | Infrared proximity detecting apparatus | Lawrence N. Harkness | 1980-06-10 |