Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4971653 | Temperature controlled chuck for elevated temperature etch processing | Gary Powell, David J. Drage | 1990-11-20 |
| 4359642 | Collimator assembly for an electron accelerator | Lothar Heinz, Robert Burror | 1982-11-16 |