Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7580119 | Method and apparatus for chemical monitoring | Herbert E. Litvak | 2009-08-25 |
| 7456939 | Method and apparatus for chemical monitoring | Herbert E. Litvak | 2008-11-25 |
| 7202946 | Method and device utilizing plasma source for real-time gas sampling | Richard Hazard | 2007-04-10 |
| 7072028 | Method and apparatus for chemical monitoring | Herbert E. Litvak | 2006-07-04 |
| 7019829 | Method and device utilizing plasma source for real-time gas sampling | Richard Hazard | 2006-03-28 |
| 6867859 | Inductively coupled plasma spectrometer for process diagnostics and control | — | 2005-03-15 |
| 6791692 | Method and device utilizing plasma source for real-time gas sampling | Richard Hazard | 2004-09-14 |
| 6757061 | Method and device utilizing real-time gas sampling | — | 2004-06-29 |
| 6538734 | Method and device utilizing real-time gas sampling | — | 2003-03-25 |
| 5209803 | Parallel plate reactor and method of use | — | 1993-05-11 |
| 5015331 | Method of plasma etching with parallel plate reactor having a grid | — | 1991-05-14 |
| 4971653 | Temperature controlled chuck for elevated temperature etch processing | David J. Drage, Tony Sie | 1990-11-20 |
| 4579618 | Plasma reactor apparatus | Salvatore A. Celestino, Georges J. Gorin, Stephen E. Hilliker | 1986-04-01 |