| 7580119 |
Method and apparatus for chemical monitoring |
Herbert E. Litvak |
2009-08-25 |
| 7456939 |
Method and apparatus for chemical monitoring |
Herbert E. Litvak |
2008-11-25 |
| 7202946 |
Method and device utilizing plasma source for real-time gas sampling |
Richard Hazard |
2007-04-10 |
| 7072028 |
Method and apparatus for chemical monitoring |
Herbert E. Litvak |
2006-07-04 |
| 7019829 |
Method and device utilizing plasma source for real-time gas sampling |
Richard Hazard |
2006-03-28 |
| 6867859 |
Inductively coupled plasma spectrometer for process diagnostics and control |
— |
2005-03-15 |
| 6791692 |
Method and device utilizing plasma source for real-time gas sampling |
Richard Hazard |
2004-09-14 |
| 6757061 |
Method and device utilizing real-time gas sampling |
— |
2004-06-29 |
| 6538734 |
Method and device utilizing real-time gas sampling |
— |
2003-03-25 |
| 5209803 |
Parallel plate reactor and method of use |
— |
1993-05-11 |
| 5015331 |
Method of plasma etching with parallel plate reactor having a grid |
— |
1991-05-14 |
| 4971653 |
Temperature controlled chuck for elevated temperature etch processing |
David J. Drage, Tony Sie |
1990-11-20 |
| 4579618 |
Plasma reactor apparatus |
Salvatore A. Celestino, Georges J. Gorin, Stephen E. Hilliker |
1986-04-01 |