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2014-10-07 |
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2014-09-23 |
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Higher power density downstream plasma |
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2006-03-21 |
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2001-07-24 |
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Downstream plasma using oxygen gas mixture |
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2000-09-05 |
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Plasma reactor apparatus and method |
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1984-08-07 |
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Apparatus for controlling a plasma reaction |
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1982-11-02 |
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Reactor apparatus for plasma etching or deposition |
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Method for process control of a plasma reaction |
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1981-04-21 |
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Plasma reactor apparatus |
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1980-06-24 |
