Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Parallel plate reactor and method of use

Parallel plate reactor and method of use

US Patent 5209803 · Granted May 11, 1993

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method and apparatus for chemical monitoring2009
Method and apparatus for chemical monitoring2008
Method and device utilizing plasma source for real-time gas sampling2007
Method and apparatus for chemical monitoring2006
Method and device utilizing plasma source for real-time gas sampling2006
Inductively coupled plasma spectrometer for process diagnostics and control2005
Method and device utilizing plasma source for real-time gas sampling2004
Method and device utilizing real-time gas sampling2004
Method and device utilizing real-time gas sampling2003
Method of plasma etching with parallel plate reactor having a grid1991
Temperature controlled chuck for elevated temperature etch processing1990
Plasma reactor apparatus1986