Herbert E. Litvak — 24 Patents at Luxtron

Herbert E. Litvak has been granted 24 US patents while listed as an inventor at Luxtron. The first was granted in 1991 and the most recent in August 2009. Herbert E. Litvak ranks #168,038 of 4,157,543 US inventors in our database (top 4.0%). Patent records list Herbert E. Litvak in Palo Alto, CA, US.

Issued Patents All Time

Showing 1–24 of 24 patents

Patent #	Title	Co-Inventors	Date	Approx Value ⓘ
7580119	Method and apparatus for chemical monitoring	Gary Powell	2009-08-25
7456939	Method and apparatus for chemical monitoring	Gary Powell	2008-11-25
7217371	Optical control interface between controller and process chamber	—	2007-05-15
7072028	Method and apparatus for chemical monitoring	Gary Powell	2006-07-04
6641470	Apparatus for accurate endpoint detection in supported polishing pads	Eugene Zhao, Kang Jia, Michael D. Steiman, Christian D. Frederickson	2003-11-04	$25,527,000
6612902	Method and apparatus for end point triggering with integrated steering	John M. Boyd	2003-09-02	$11,792,000
6426232	Optical techniques of measuring endpoint during the processing of material layers in an optically hostile environment	—	2002-07-30
6413147	Optical techniques of measuring endpoint during the processing of material layers in an optically hostile environment	—	2002-07-02
6254459	Wafer polishing device with movable window	Rajeev Bajaj, Rahul Surana, Stephen Jew, Jiri Pecen	2001-07-03	$36,111,000
6110752	Optical techniques of measuring endpoint during the processing of material layers in an optically hostile environment	—	2000-08-29
6077452	Optical techniques of measuring endpoint during the processing of material layers in an optically hostile environment	—	2000-06-20
6068539	Wafer polishing device with movable window	Rajeev Bajaj, Rahul Surana, Stephen Jew, Jiri Pecen	2000-05-30	$36,712,000
6027760	Photoresist coating process control with solvent vapor sensor	Emir Gurer, Richard Savage	2000-02-22
6010538	In situ technique for monitoring and controlling a process of chemical-mechanical-polishing via a radiative communication link	Mei Sun, Huey-Ming Tzeng, Daniel E. Glenn, Earl Jensen, Frank J. Hausman +1 more	2000-01-04
5946082	Interference removal	Steven C. Leach, Edward G. Rodgers	1999-08-31
5891352	Optical techniques of measuring endpoint during the processing of material layers in an optically hostile environment	—	1999-04-06
5786886	Interference removal	Steven C. Leach, Edward G. Rodgers	1998-07-28
5695660	Optical techniques of measuring endpoint during the processing of material layers in an optically hostile environment	—	1997-12-09
5499733	Optical techniques of measuring endpoint during the processing of material layers in an optically hostile environment	—	1996-03-19
5414504	Interference removal	Steven C. Leach, Edward G. Rodgers	1995-05-09
5308447	Endpoint and uniformity determinations in material layer processing through monitoring multiple surface regions across the layer	Russell E. Lewis, Richard E. Howard	1994-05-03
5208644	Interference removal	Steven C. Leach, Edward G. Rogers	1993-05-04
5190614	Method of endpoint detection and structure therefor	Steven C. Leach, Jewett W. Fowler, Mariste A. Thomson	1993-03-02
5064269	Light collection method and apparatus	Edward G. Rogers	1991-11-12

Herbert E. Litvak — 24 Patents

Issued Patents All Time

Patent Widget