Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11986926 | Slurry distribution device for chemical mechanical polishing | Yen-Chu Yang, Jianshe Tang, Haosheng Wu, Shou-Sung Chang, Paul D. Butterfield +2 more | 2024-05-21 |
| 11806835 | Slurry distribution device for chemical mechanical polishing | Yen-Chu Yang, Jianshe Tang, Haosheng Wu, Shou-Sung Chang, Paul D. Butterfield +2 more | 2023-11-07 |
| 11787008 | Chemical mechanical polishing with applied magnetic field | Xingfeng Wang, Jianshe Tang, Feng Q. Liu, David Maxwell Gage | 2023-10-17 |
| 11077536 | Slurry distribution device for chemical mechanical polishing | Yen-Chu Yang, Jianshe Tang, Haosheng Wu, Shou-Sung Chang, Paul D. Butterfield +2 more | 2021-08-03 |
| 10967483 | Slurry distribution device for chemical mechanical polishing | Yen-Chu Yang, Jianshe Tang, Haosheng Wu, Shou-Sung Chang, Paul D. Butterfield +2 more | 2021-04-06 |
| 10589397 | Endpoint control of multiple substrate zones of varying thickness in chemical mechanical polishing | Alain Duboust, Wen-Chiang Tu, Shih-Haur Shen, Jimin Zhang, Ingemar Carlsson +4 more | 2020-03-17 |
| 9005999 | Temperature control of chemical mechanical polishing | Kun Xu, Jimin Zhang, David H. Mai, Shih-Haur Shen, Zhihong Wang +4 more | 2015-04-14 |
| 8694144 | Endpoint control of multiple substrates of varying thickness on the same platen in chemical mechanical polishing | Alain Duboust, David H. Mai, Huyen Tran, Wen-Chiang Tu, Shih-Haur Shen +4 more | 2014-04-08 |
| 8616935 | Control of overpolishing of multiple substrates on the same platen in chemical mechanical polishing | Jimin Zhang, Ingemar Carlsson, Boguslaw A. Swedek | 2013-12-31 |
| 8292691 | Use of pad conditioning in temperature controlled CMP | Kun Xu, Thomas H. Osterheld, Jimin Zhang | 2012-10-23 |
| 8295967 | Endpoint control of multiple-wafer chemical mechanical polishing | Jimin Zhang, Thomas H. Osterheld, Ingemar Carlsson, Boguslaw A. Swedek | 2012-10-23 |
| 8021211 | Substrate holder with liquid supporting surface | Hung Chih Chen, Yin Yuan | 2011-09-20 |
| 6666755 | Belt wiper for a chemical mechanical planarization system | Travis R. Taylor, Christian DiPietro, Philip Ngoon, Katgenahalli Y. Ramanujam, Tony Luong | 2003-12-23 |
| 6254459 | Wafer polishing device with movable window | Rajeev Bajaj, Herbert E. Litvak, Rahul Surana, Jiri Pecen | 2001-07-03 |
| 6068539 | Wafer polishing device with movable window | Rajeev Bajaj, Herbert E. Litvak, Rahul Surana, Jiri Pecen | 2000-05-30 |