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Autoclean for load locks in substrate processing systems |
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Halogen removal module and associated systems and methods |
Adam Bateman, Todd A. Lopes, Sankaranarayanan RAVI, Silvia Aguilar, Derek John Witkowicki |
2021-01-26 |
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Symmetric RF return path liner |
David Carman, Devin Ramdutt |
2018-04-24 |
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Systems and methods for quantifying particle performance in a substrate processing system |
— |
2016-05-10 |
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Plasma confinement ring assembly for plasma processing chambers |
Anthony de la Llera, David Carman, Saurabh Ullal, Harmeet Singh |
2015-07-07 |
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Method of making a gas distribution member for a plasma processing chamber |
— |
2014-11-11 |
| 8845856 |
Edge ring assembly for plasma etching chambers |
Michael Kang, Michael C. Kellogg, Miguel Saldana |
2014-09-30 |
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High lifetime consumable silicon nitride-silicon dioxide plasma processing components |
Mukund Srinivasan, Bobby Kadkhodayan, K. Y. Ramanujam, Biljana Mikijelj, Shanghua Wu |
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System and method for in situ characterization and maintenance of polishing pad smoothness in chemical mechanical polishing |
Jingang Yi, Peter Norton |
2006-12-26 |
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Assembly and method for generating a hydrodynamic air bearing |
Carsten Mehring |
2006-04-11 |
| 7004825 |
Apparatus and associated method for conditioning in chemical mechanical planarization |
Robert Charatan, Robert Luke Anderson |
2006-02-28 |
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Apparatus for edge polishing uniformity control |
Cangshan Xu |
2006-01-31 |
| 6887338 |
300 mm platen and belt configuration |
— |
2005-05-03 |
| 6790128 |
Fluid conserving platen for optimizing edge polishing |
Cangshan Xu |
2004-09-14 |
| 6769970 |
Fluid venting platen for optimizing wafer polishing |
Alan J. Jensen |
2004-08-03 |
| 6752898 |
Method and apparatus for an air bearing platen with raised topography |
Robert Luke Anderson, Robert Charatan |
2004-06-22 |
| 6712679 |
Platen assembly having a topographically altered platen surface |
Cangshan Xu, Kevin T. Crofton, Eugene Zhao |
2004-03-30 |
| 6666755 |
Belt wiper for a chemical mechanical planarization system |
Christian DiPietro, Stephen Jew, Philip Ngoon, Katgenahalli Y. Ramanujam, Tony Luong |
2003-12-23 |
