Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8622021 | High lifetime consumable silicon nitride-silicon dioxide plasma processing components | Travis R. Taylor, Mukund Srinivasan, Bobby Kadkhodayan, Biljana Mikijelj, Shanghua Wu | 2014-01-07 |
| 7040952 | Method for reducing or eliminating de-lamination of semiconductor wafer film layers during a chemical mechanical planarization process | Sridharan Srivatsan, Ramesh Gopalan | 2006-05-09 |
| 5714037 | Method of improving adhesion between thin films | Kumar D. Puntambekar, Tom Blount, Ray Liang | 1998-02-03 |