Issued Patents All Time
Showing 25 most recent of 49 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12334354 | Sidewall passivation for plasma etching | Zhonghua Yao, Qian Fu, Aaron Eppler | 2025-06-17 |
| 11948783 | Dynamic phased array plasma source for complete plasma coverage of a moving substrate | Hari Ponnekanti | 2024-04-02 |
| 11705335 | Conformal high concentration boron doping of semiconductors | Srinivas Gandikota, Abhijit Basu Mallick, Swaminathan Srinivasan, Rui Cheng, Susmit Singha Roy +2 more | 2023-07-18 |
| 11545504 | Methods and apparatus for three dimensional NAND structure fabrication | Takehito Koshizawa, Tomohiko Kitajima, Chang-Seok Kang, Sung-Kwan Kang, Gill Yong Lee +1 more | 2023-01-03 |
| 11430801 | Methods and apparatus for three dimensional NAND structure fabrication | Takehito Koshizawa, Tomohiko Kitajima, Chang-Seok Kang, Sung-Kwan Kang, Gill Yong Lee +1 more | 2022-08-30 |
| 11328928 | Conformal high concentration boron doping of semiconductors | Srinivas Gandikota, Abhijit Basu Mallick, Swaminathan Srinivasan, Rui Cheng, Susmit Singha Roy +2 more | 2022-05-10 |
| 11276569 | On stack overlay improvement for 3D NAND | Yongjing Lin, Tza-Jing Gung, Masaki Ogata, Yusheng Zhou, Xinhai Han +3 more | 2022-03-15 |
| 11189635 | 3D-NAND mold | Chang-Seok Kang, Tomohiko Kitajima, Sanjay Natarajan | 2021-11-30 |
| 11152248 | Cyclic flowable deposition and high-density plasma treatment processes for high quality gap fill solutions | Jingmei Liang, Yong Sun, Jinrui GUO, Praket P. Jha, Jung Chan Lee +1 more | 2021-10-19 |
| 10998329 | Methods and apparatus for three dimensional NAND structure fabrication | Takehito Koshizawa, Tomohiko Kitajima, Chang-Seok Kang, Sung-Kwan Kang, Gill Yong Lee +1 more | 2021-05-04 |
| 10924550 | Framework for distributed key-value store in a wide area network | Yuehai Xu, Enning Xiang, Jorge Guerra Delgado | 2021-02-16 |
| 10734265 | Semiconductor process equipment | Karthik Janakiraman, Hari Ponnekanti, Juan Carlos Rocha | 2020-08-04 |
| 10707116 | Cyclic flowable deposition and high-density plasma treatment processes for high quality gap fill solutions | Jingmei Liang, Yong Sun, Jinrui GUO, Praket P. Jha, Jung Chan Lee +1 more | 2020-07-07 |
| 10565615 | System and method for personalized add-on purchase | Jonathan Burr | 2020-02-18 |
| 10475644 | Dielectric-metal stack for 3D flash memory application | Xinhai Han, Nagarajan Rajagopalan, Sung Hyun Hong, Bok Hoen Kim | 2019-11-12 |
| 10460936 | Photo-assisted deposition of flowable films | Brian Saxton Underwood, Abhijit Basu Mallick, Juan Carlos Rocha-Alvarez | 2019-10-29 |
| 10403535 | Method and apparatus of processing wafers with compressive or tensile stress at elevated temperatures in a plasma enhanced chemical vapor deposition system | Zheng John Ye, Jay D. Pinson, II, Hiroji Hanawa, Jianhua Zhou, Xing Lin +11 more | 2019-09-03 |
| 10380077 | System and method for upload and synchronization of media content to cloud based media services | Deepa Suresh | 2019-08-13 |
| 10332727 | Methods for processing substrates using small plasma chambers | Richard A. Gottscho, Rajinder Dhindsa | 2019-06-25 |
| 10236197 | Processing system containing an isolation region separating a deposition chamber from a treatment chamber | Karthik Janakiraman, Abhijit Basu Mallick, Hari Ponnekanti, Mandyam Sriram, Alexandros T. Demos +2 more | 2019-03-19 |
| 10056279 | Semiconductor process equipment | Karthik Janakiraman, Hari Ponnekanti, Juan Carlos Rocha | 2018-08-21 |
| 10041167 | Cyclic sequential processes for forming high quality thin films | Jingmei Liang, Jung Chan Lee, Jinrui GUO | 2018-08-07 |
| 10033812 | Framework for distributed key-value store in a wide area network | Yuehai Xu, Enning Xiang, Jorge Guerra Delgado | 2018-07-24 |
| 9972487 | Dielectric-metal stack for 3D flash memory application | Xinhai Han, Nagarajan Rajagopalan, Sung Hyun Hong, Bok Hoen Kim | 2018-05-15 |
| 9911578 | Small plasma chamber systems and methods | Richard A. Gottscho, Rajinder Dhindsa | 2018-03-06 |