| 12421607 |
Systems and methods for substrate support temperature control |
Zubin Huang, Jian Li |
2025-09-23 |
|
| 12400599 |
Display apparatus having signal lines on a multi-layer metal layer |
Erlong Song, Hailong Yan, Jingli Zhang, Yagui Gao, Kai Zhang +2 more |
2025-08-26 |
|
| 12382820 |
Display panel |
Wenbo Hu, Qiang Fu, Yaohong Tan, Wen Sun, Jenyu Lee +4 more |
2025-08-05 |
|
| 12365986 |
Remote capacitively coupled plasma deposition of amorphous silicon |
Zubin Huang, Chen-An Chen, Karthik Janakiraman |
2025-07-22 |
|
| 12334358 |
Integration processes utilizing boron-doped silicon materials |
Takehito Koshizawa, Karthik Janakiraman, Krishna Nittala, Menghui Li, Ming-Yuan Chuang +8 more |
2025-06-17 |
|
| 12325910 |
Deposition of conformal and gap-fill amorphous silicon thin-films |
Yihong Chen, Pramit Manna, Kelvin Chan, Karthik Janakiraman, Abhijit Basu Mallick +1 more |
2025-06-10 |
|
| 12256582 |
Display panel, manufacturing method and display device |
Yunpeng Zhang, Lele SUN |
2025-03-18 |
|
| 12255054 |
Methods to eliminate of deposition on wafer bevel and backside |
Venkata Sharat Chandra Parimi, Zubin Huang, Manjunath Veerappa Chobari Patil, Nitin Pathak, Yi Yang +3 more |
2025-03-18 |
|
| 12205818 |
Boron concentration tunability in boron-silicon films |
Yi Yang, Krishna Nittala, Karthik Janakiraman, Diwakar Kedlaya, Zubin Huang +1 more |
2025-01-21 |
|
| 12197479 |
Semantic matching and retrieval method and apparatus and non-transitory computer-readable medium |
Bin Dong, Shanshan Jiang, Lu Luo, Lei Ding |
2025-01-14 |
|
| 12183578 |
Method for forming and patterning a layer and/or substrate |
Takehito Koshizawa, Tejinder Singh, Hidetaka Oshio |
2024-12-31 |
$49,330,000 |
| 12175206 |
Method and apparatus for machine reading comprehension, and non-transitory computer-readable recording medium |
Tianxiong XIAO, Bin Dong, Shanshan Jiang, Jiashi Zhang |
2024-12-24 |
$802,000 |
| 12142480 |
Seam removal in high aspect ratio gap-fill |
Qinghua Zhao, Ruiyun Huang, Dong-Hyung LEE, Aykut Aydin, Karthik Janakiraman |
2024-11-12 |
$39,712,000 |
| 12077852 |
Metal-doped boron films |
Aykut Aydin, Karthik Janakiraman |
2024-09-03 |
$44,731,000 |
| 12062567 |
Systems and methods for substrate support temperature control |
Zubin Huang, Diwakar Kedlaya, Satish Radhakrishnan, Anton Baryshnikov, Venkatanarayana Shankaramurthy +3 more |
2024-08-13 |
$69,975,000 |
| 12033848 |
Processes for depositing sib films |
Aykut Aydin, Karthik Janakiraman, Abhijit Basu Mallick, Takehito Koshizawa, Bo Qi |
2024-07-09 |
$62,454,000 |
| 11981998 |
Systems and methods for substrate support temperature control |
Zubin Huang, Jian Li |
2024-05-14 |
$61,768,000 |
| 11961739 |
Boron concentration tunability in boron-silicon films |
Yi Yang, Krishna Nittala, Karthik Janakiraman, Diwakar Kedlaya, Zubin Huang +1 more |
2024-04-16 |
$82,852,000 |
| 11939675 |
Apparatus and methods for improving thermal chemical vapor deposition (CVD) uniformity |
Karthik Janakiraman, Zubin Huang |
2024-03-26 |
$55,219,000 |
| 11848232 |
Method for Si gap fill by PECVD |
Xin Liu, Fei Wang, Abhijit Basu Mallick, Robert Jan Visser |
2023-12-19 |
$56,890,000 |
| 11830706 |
Heated pedestal design for improved heat transfer and temperature uniformity |
Venkata Sharat Chandra Parimi, Zubin Huang, Jian Li, Satish Radhakrishnan, Diwakar Kedlaya +7 more |
2023-11-28 |
$39,424,000 |
| 11769666 |
Selective deposition of silicon using deposition-treat-etch process |
Fei Wang, Abhijit Basu Mallick, Robert Jan Visser |
2023-09-26 |
$66,272,000 |
| 11705335 |
Conformal high concentration boron doping of semiconductors |
Srinivas Gandikota, Abhijit Basu Mallick, Swaminathan Srinivasan, Susmit Singha Roy, Gaurav Thareja +2 more |
2023-07-18 |
$58,990,000 |
| 11676813 |
Doping semiconductor films |
Aykut Aydin, Yi Yang, Krishna Nittala, Karthik Janakiraman, Bo Qi +1 more |
2023-06-13 |
$42,513,000 |
| 11640905 |
Plasma enhanced deposition of silicon-containing films at low temperature |
Aykut Aydin, Karthik Janakiraman |
2023-05-02 |
$66,273,000 |
