Issued Patents All Time
Showing 51–70 of 70 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10626495 | Bottom-up growth of silicon oxide and silicon nitride using sequential deposition-etch-treat processing | Abhijit Basu Mallick, Pramit Manna | 2020-04-21 |
| 10615050 | Methods for gapfill in high aspect ratio structures | Abhijit Basu Mallick, Pramit Manna, Yihong Chen | 2020-04-07 |
| 10559465 | Pre-treatment approach to improve continuity of ultra-thin amorphous silicon film on silicon oxide | Yi Yang, Yihong Chen, Karthik Janakiraman, Abhijit Basu Mallick | 2020-02-11 |
| 10529568 | PECVD tungsten containing hardmask films and methods of making | Susmit Singha Roy, Pramit Manna, Abhijit Basu Mallick | 2020-01-07 |
| 10510589 | Cyclic conformal deposition/anneal/etch for Si gapfill | Yi Yang, Abhijit Basu Mallick | 2019-12-17 |
| 10460933 | Two-step process for gapfilling high aspect ratio trenches with amorphous silicon film | Pramit Manna, Shishi Jiang, Abhijit Basu Mallick | 2019-10-29 |
| 10410872 | Borane mediated dehydrogenation process from silane and alkylsilane species for spacer and hardmask application | Ziqing Duan, Milind Gadre, Praket P. Jha, Abhijit Basu Mallick, Deenesh Padhi | 2019-09-10 |
| 10410864 | Hybrid carbon hardmask for lateral hardmask recess reduction | Thomas Jongwan Kwon, Abhijit Basu Mallick, Er-Xuan Ping, Jaesoo Ahn | 2019-09-10 |
| 10347488 | Titanium compound based hard mask films | Wei V. Tang, Pramit Manna, Abhijit Basu Mallick, Srinivas Gandikota | 2019-07-09 |
| 10319600 | Thermal silicon etch | Zihui Li, Anchuan Wang, Nitin K. Ingle, Abhijit Basu Mallick | 2019-06-11 |
| 10276379 | Treatment approach to improve film roughness by improving nucleation/adhesion of silicon oxide | Abhijit Basu Mallick, Yihong Chen | 2019-04-30 |
| 10192775 | Methods for gapfill in high aspect ratio structures | Pramit Manna, Ludovic Godet, Erica Chen, Ziqing Duan, Abhijit Basu Mallick +1 more | 2019-01-29 |
| 10128150 | Process of filling the high aspect ratio trenches by co-flowing ligands during thermal CVD | Pramit Manna, Kelvin Chan, Abhijit Basu Mallick | 2018-11-13 |
| 9991118 | Hybrid carbon hardmask for lateral hardmask recess reduction | Thomas Jongwan Kwon, Abhijit Basu Mallick, Er-Xuan Ping, Jaesoo Ahn | 2018-06-05 |
| 9865459 | Plasma treatment to improve adhesion between hardmask film and silicon oxide film | Pramit Manna, Abhijit Basu Mallick | 2018-01-09 |
| 9640400 | Conformal doping in 3D si structure using conformal dopant deposition | Abhijit Basu Mallick, Srinivas Gandikota, Pramit Manna | 2017-05-02 |
| 9624577 | Deposition of metal doped amorphous carbon film | Pramit Manna, Abhijit Basu Mallick, Mukund Srinivasan | 2017-04-18 |
| 8278765 | Test-key for checking interconnect | Yeh-Sheng Cheng, Hsueh-Wen Wang, Shu-Yun Liao, Chih-Ying Chien, Hsin-Yu Lu | 2012-10-02 |
| 7989804 | Test pattern structure | Da Yang, Chih-Ping Lee, Xing Zhang, Xu Jason Ma, Xiao Han +3 more | 2011-08-02 |
| 7514278 | Test-key for checking interconnect and corresponding checking method | Yeh-Sheng Cheng, Hsueh-Wen Wang, Shu-Yun Liao, Chih-Ying Chien, Hsin-Yu Lu | 2009-04-07 |